Design And Fabrication Of Flexible Pressure Sensor Based On Porous PDMS

In order to overcome the problems of preparation of flexible pressure sensor proposed in the existing literature,porous PDMS based flexible pressure sensor was proposed in this paper,and the influence of the pore size and the structurized shape of the porous PDMS on the sensing performance was also investigated.Firstly,the preparation method of the porous PDMS was studied.The salt template method was selected and innovative optimized by introducing micro-zone fusion treatment into the preparation process to improve material performance of the as-fabricated porous PDMS.Through which,the porous PDMS with good material performance,such as good pore size control,powerful structurized capability,low particle residue and high interconnectivity,was successfully fabricated.At the same time,the preparation speed was greatly improved.In addition,the vacuum suction method was proposed in this paper to prepare conductive porous PDMS,which,provides a new technical route for the preparation of the flexible piezoresistive material.Secondly,the effects of the pore size and the structurized shape of the porous PDMS on the sensing performance of both of the porous PDMS based capacitive and resistive flexible pressure sensors were investigated.In the case of the capacitive pressure sensors,the pore size and the structurized shape of the porous PDMS both have significant influence on the sensing performance.The capacitive pressure sensors with different sensitivities can be obtained by adjusting the pore size and designing the structuized shape of the porous PDMS.In comparison,in the study of the resistive pressure sensors,the pore size of the porous PDMS has a certain impact on the sensing performance,whilst the effect of the structurized shape of the porous PDMS is weak.