Sensitivity Analysis And Motion Precision Reliability Analysis Of DZ507 Dicing Machine

A microtome is a high-precision device for cutting semiconductor wafers.With the rapid development and use of semiconductors,the market demand for its production gradually increased,at the same time the performance requirements are getting higher and higher.As a result,there is a growing demand for cutting accuracy and performance stability for cutting wafer equipment.The main reason for the machining error of slicing machine is that the motion accuracy of slicer is decreased.Therefore,in the design and production of slicing machine,to maintain the accuracy of the motion of slicing machine stability is particularly important.In this paper,a new generation of dicing machine DZ507 with the cooperation of a research institute is studied.First of all,in order to establish the 3D model of the dicing machine,through the communication with the enterprise technical personnel,and on the basis of the previous generation dicing machine to determine the size of DZ507 dicing machine parts,standard parts model.Then,the structure and function of the scribing machine and its sub-systems are analyzed.The scribing machine is divided into five sub-functional systems.Then the error model of the microtome is established by using the theory of multi-body system modeling,and the error model is simplified.According to the classification of the error,the error model is established only in the installation error and the error of installation and motion Error model.Sensitivity analysis of the error model under the effect of mounting error and motion error was carried out by using Sobol' sensitivity analysis method.By using Matlab and Isight software,the primary and secondary factors affecting the cutting error in the X,Y and Z axes are obtained,and the influence of the interaction between different error terms on the cutting error is analyzed.Then,Monte Carlo digital simulation method is used to analyze the reliability of the slicing machine,and the reliability of the cutting error in X,Y and Z directions is calculated.The influence of the error parameters on the reliability is also studied.Finally,the reliability of the slicer is allocated.By using the reliability level fuzzy analysis method,the failure probability of each subsystem is calculated,and the reliability of each subsystem should be determined.