Micro Blue Light Devices For Visible Light Communication

Visible light communication(VLC)occupies an absolute dominant position in today's society.It has penetrated into people's life and owns prosperous future for development.Optical communication,especially the blue light emitting diode(LED)communication applies in many fields for their low power consumption and high energy efficiency,such as intelligent transportation,navigation guidance,RF detection,medical treatment etc.In addition,the difficult incursion and high security of blue light communication have an important impact on the military field.Nowadays,it is very important for blue light communication to realize the micro optical receiver and transmitter.The micro device can solve the problem of short distance or even ultrashort distance optical communication and improve the communication rate.Therefore,semiconductor researchers based on micro-nano device are using on-chip integration technology to realize the multi-functional integration of various components on one chip.This thesis based on traditional communication and optical communication realize the integration of blue LED,optical waveguide and photoelectric detector(PD)on silicon nitride wafer.In one hand,the wireless communication device of double diodes by interval arrangement to satisfy the wirelsee communication.In another hand,combined with gain and loss of bend waveguide,a semi annular bend waveguide micro device is fabricated to change the light path and energy.The device can be also used to photonic integrated circuit.With the aid of micro-nano research platform and kinds of instruments in the laboratory,the fabrication and measurement of device is completed.The result of measure is verified by Rsoft.In this thesis,the micro blue devices were approximately 450 nm wavelength.It has been indicated that wireless communication device can achieve 50 Mbps rate with low inter symbol interference(ISI)and 80 Mbps rate with low error.The stable rate of the device is from 30 Mbps to 90 Mbps rate.The bend waveguide device consists of two rectangular and half-ring structures.The transmission layer is 5?m width,the rectangular waveguide is 160?m length and the half-ring is 16?m diameter.The device has realized a simple photonic integrated circuit with direct light modulation which utilizes blue ray as the carrier,and achieve 30 Mbps rate with low ISI.The rate could reach to 50 Mbps with low distortion and no consideration of eye diagram.Finally,Rsoft simulation had provided the auxiliary for practical measurement.In addition,the light efficiency of bend optical waveguide has changed with various diameters.Especially 16?m diameter is boundary condition.In brief,the simulation results provide a theoretical basis for subsequent research.The results indicate the feasibility of micro blue light devices in VLC and photonic integration field.The device establishes foundation for micro terminal equipments and so on based on optical interconnect.