Development Of Novel High Temperature Transient Heat-Flux Sensor Based On Thin Thermopile

The heat flux sensors on the market are mostly imitations of foreign products.The measurement of heat flux at high temperatures is mostly provided by foreign manufacturers,especially for the high temperature transient heat flux sensors used in aircrafts.And due to the differences in the production of each heat flux sensor,the process is not mature,the sensor consistency is poor,and the sensitivity is limited.Therefore,the development of a sensor for high temperature transient heat flux measurement has profound implications for the design and airworthiness validation of aircraft thermal protection systems.This paper has obtained the following research results:(1)A thermocouple detection device consisting of thermocouples and thermocouples is proposed,determining 200 pairs of copper-constantan thermocouple combined thermopiles.The line width is 0.1mm,the line length is 1mm,and the thickness is 1?m.The alumina tape acts as a thermal resistance layer.(2)A set of mature,high-temperature,transient heat flux sensor fabrication process was established.The sensing region was fabricated based on the photolithography process and the ion beam sputtering deposition process.It is determined that the coating rate consistency is the best at 800 eV and the film uniformity is higher.The best process parameters are:ion beam energy 800eV,ion beam current 120mA,neutralization current 156mA.(3)Three new heat flux sensors are calibrated using a self-built calibration system.The sensing area coefficients are 8.222kW/(m2·mV)m 8.273kW/(m2·mV),and 8.269kW/(m2·mV)respectively.The linear fitting works well.In order to improve the accuracy of the measurement,it is proposed to correct the output results under the test environment by compensating the quantity ?Yi.The consistency test error is 0.211%.Through the repeatability test,the precision is 99.65%,99.787%,and 99.86%.The analysis of the error is mainly caused by the disturbance of the air in the environment and the delayed response of the calibration device.The research shows that the innovative high-temperature transient heat flux sensor has very good consistency,the preparation process has good repeatability and portability,it can realize the need for high-temperature transient heat flow detection.It provides good technical support for the popularization and application of heat flux sensors and standardization and mass production.