Driving Mode Research And System Implementation Of MEMS Ring Gyroscope Based On Parametric Excitation

MEMS gyroscope is a kind of inertial sensor to measure the angular velocity and is designed based on the Coriolis force effect.It is widely used in aviation,navigation,weapon,cars and so on many fields because of the advantages of small size,light weight,low cost,low power consumption and easy to digital.Because of the performance of MEMS ring gyroscope is directly related to the driving mode,the study of the driving mode of MEMS ring gyroscope is significant.Parameter excitation method is a driving mode that change one of the parameters in the motion system periodically.When it is applied to MEMS ring vibratory gyroscope,it can effectively reduce the driving signal,thereby reducing the electrical feedback from the driving mode to the sensitive mode,and improving the signal-to-noise ratio and Q value.In this paper,the MEMS ring gyroscope is used as the research object.We focus on the effect of the parameter excitation applied to the gyroscope driving mode.The main work is as follows:First of all,the effect of parametric excitation on MEMS ring gyroscope is analyzed theoretically and verified by simulation.Secondly,we have determined the overall scheme of the MEMS Ring Gyroscope driven by the parametric excitation method,based on the PLL-AGC control system and introducing the control of the parametric excitation signal.Thirdly,we analyze and design each module of the system,and complete the whole set of digital measurement and control system based on FPGA chip,considering the quantization error and resource occupation in digital signal processing.The phase and amplitude control precision of the system is guaranteed.Finally,the MEMS ring gyroscope is tested on the completed system.The effect of the parameter excitation method is verified.