Research On The Key Techniques Of Three-dimensional Profilometer Based On Coplanar Guide

Precision measurement technology is an important part of the modern machinery industry,it plays a great role in precision machining and precision design,it is very important for the verification of parameters of the product performance and life,so many countries are committed to the research of precision measurement technology,precision measurement equipment and technology have become the priority development projects of many countries.With the apply of automatic control technology,computer technology,laser technology in the field of precision measurement applications,precision measurement has developed rapidly,and a large number of precision optical mechanical and electrical equipment has emerged.The accuracy of the measurement system,which is represented by the coordinate profiler,is mainly affected by the sensor,the guide rail,the driving position and the environmental conditions.It is helpful to improve the accuracy of the measurement system by studying the influence law and improving the precision of each part.In this paper,a three-dimensional profiler topology based on coplanar rails was proposed.It is expected to simplify the processing and adjustment of the three-axis coordinate profiler.The measurement system was designed and the key components were selected according to the requirements of the system.The research work of this paper mainly includes the following parts:Based on the structure of the coplanar rail,the precision drive technology and the open air bearing structure were applied to the three-dimensional profile of the coplanar rail,and the three-dimensional profile measuring instrument system was designed.The theoretical study on the open air bearing and coplanar rails were carried out.The structure of the open air float bearing was determined,and the bearing and stiffness of the aerosol block were analyzed.The curve of the bearing and stiffness of the air film were obtained.The load of the aerodynamic block was 200-250 N and the maximum rigidity was 20N/?m.The design of the other components were completed.The design of the profiler measuring platform was completed.Based on the method of straightness error evaluation,the straightness was evaluated under several different driving conditions,and the straightness of X-axis was 0.31?m,the straightness of Y-axis was 0.61?m under the magnetic force driving.The linearity of the X-axis was0.68?m,the linearity of the Y-axis was 0.78?m under the linear bearings driving,the linearity of the X-axis was about 0.7?m,the linearity of the Y-axis was about 1.6 ?m of the wirerope driving.Based on Matlab,a set of surface measurement software was designed.The repetitive measurement experiment of magnetic driving and linear bearing driving werecarried out.The experimental results showed that the repeatability was good,and the flatness of the linear bearing was calibrated.The accuracy of the surface measurement was about 1.625?m,and the influence factors of the error in the whole experiment were analyzed and discussed.