Research On MEMS Accelerometer For Tunneling Graphene

The tunneling accelerometer has high sensitivity,but the tunneling terminal current is too large,and the general tunneling junction material is prone to electrical migration,which leads to the tunneling accelerometer sensitivity becoming lower and lower,which greatly reduces the actual working performance of the tunneling accelerometer.In this paper,graphene materials can effectively avoid the phenomenon of electric migration,according to the characteristics of graphene technology,combined with six specific design of graphene cantilever structure.By designing the size of the mass block and cantilever structure,the sensitivity of the tunneling graphene mems accelerometer can be greatly improved.Based on the principle comsol tunneling accelerometer,six kinds of common structures of graphene cantilever are proposed,unilateral single cantilever,unilateral double cantilever,unilateral "s" double cantilever,these structures are bilateral single cantilever,bilateral double cantilever,bilateral " s" double cantilever.The modes of the graphene cantilever are analyzed in detail,and the first six order characteristic frequencies and diagram of six graphene cantilever are obtained.The arc length variation of the designed six graphene cantilever with inertial force is simulated.It is necessary to study the relationship between the graphene cantilever and the inertial force,because the graphene cantilever is mainly used to induce the acceleration change.In this paper,the variation of the cantilever length of graphene with inertial force is simulated.The single-sided cantilever and the bilateral cantilever have their own characteristics in the variation of arc length and displacement,but the sensitivity of the simple graphene cantilever to acceleration is not very high.Therefore,this paper specially added the graphene cantilever and gold material mass block after the situation analysis,through the simulation results can be found that the mass block can greatly improve the sensitivity of the accelerometer.The relationship between the graphene cantilever and the driving voltage was investigated.I found that the graphene material is very sensitive to the driving voltage,and very small voltage can lead to a large deformation of graphene the distance between the graphene cantilever and the driving electrode can be raised when the graphene cantilever actually works.The corresponding fitting analysis of the simulation results is carried out,and the parameters of some empirical formulas are obtained.The accelerometer was subjected to multi-physical field coupling analysis of solid mechanics and electrostatic field.In this paper,the multi-physical coupling simulation analysis of solid mechanics and electrostatic field is carried out,and the test platform of accelerometer is designed in combination with the existing equipment in the laboratory,and the corresponding signal reading code is written for the designed test platform.Because the actual working environment of the accelerometer is the coupling of inertial force and driving voltage.