Reserach On High Power And High-stability Microwave Power Supply

Science and technology are developing rapidly in the present,microwave plasma technology has become increasingly mature,and its inventions and achievements have been widely used in industrial production and daily life.Microwave plasma,with its advantages of high electron temperature,high electron density,high ionization degree,wide working pressure range and no electrode pollution,has been recognized and favored by the industry.At the same time,as the energy supply unit and core part of microwave plasma equipment,microwave power supply,its output power level and stability are always restricting the development of microwave plasma technology.Therefore,the research and design of a microwave power source with high output power and strong stability not only have great scientific application value,but also high commercial value.This thesis discusses the research and design of high stability and high power microwave power supply system.By analyzing the working principle and power factor of magnetron,the core component of microwave power supply,the control scheme of the system is developed.Because the controlled object in this design is non-linear,has many interference factors,the model is difficult to materialize,so the neural network PID control is adopted as the core of the system control scheme,in order to achieve the ideal control effect.Through experimental analysis and verification on the Matlab/Simulink simulation platform,it can be concluded that neural network PID control has strong robustness and anti-interference ability,better static characteristics and dynamic response,and excellent self-learning and improvement ability.In terms of the software program designed in this thesis,C language is adopted for modular programming in the platform of ATmega16 L MCU to realize stable continuous adjustable microwave output power in the range of 0-10kw.In terms of hardware circuit,it is mainly composed of five parts: magnetic field power supply circuit,electric field power supply circuit,filament power supply circuit,SCM control circuit and peripheral auxiliary protection circuit.At the same time,considering that microwave power equipment is expensive and heavy,covers a large area,requires high environmental factors,and the field circuit is complex,and high voltage and microwave pose security risks to experimenters,this thesis applies the emerging technology of virtual instrument to the design.The virtual instrument isolates the equipment from the monitoring room,purifies the experimental environment and avoids safety hazards,and enables the experimenter to carry out remote monitoring and adjustment.In this thesis,the control scheme is analyzed and developed,and the hardware circuit and software program are studied and designed in detail.It is believed that on this basis,through continuous improvement and perfection,a more secure and efficient microwave power supply system more in line with industry requirements and standards will be obtained.