Design And Research On Mechanical System For Ultrasonic Cleaning Equipment Of AMOLED

AMOLED display uses a glass substrate as the material,and the cleanliness of the glass substrate plays a key role in the yield of the flexible screen.The removal of suspended particles on the surface of the glass substrate is a key factor in determining the cleanliness.However,the conventional cleaning technology can not meet the requirements of product processing accuracy.Therefore,in order to achieve the best cleaning effect,the surface of the glass substrate is cleaned by using an ultrasonic cleaning device.The principle of cleaning is that the "air knife" generated by the pressure chamber of the cleaning head in the device destroys the adhesion layer of the suspended particles on the surface of the glass substrate,separates it,and is finally sucked away by the vacuum chamber.Therefore,whether the ultrasonic cleaning equipment can smoothly perform the cleaning operation requires designing the mechanical system of the equipment and checking the key components in the system.The specific research contents are as follows:First of all,this topic elaborates the composition of the ultrasonic cleaning equipment system,the performance index of the equipment and the operating principle of the equipment from the overall structure of the ultrasonic cleaning equipment.Through the analysis of the structure of the equipment cleaning head,the principle of air circulation and cleaning principle of the equipment are clarified.By establishing a model of the cross section of the ultrasonic generator,the transmission principle and convergence principle of the ultrasonic wave are analyzed,and the understanding of the principle of equipment cleaning is deepened.Secondly,the mechanical design of the ultrasonic cleaning equipment is designed separately by using the modular design idea.It mainly includes: aiming at the working principle and advantages and disadvantages of the traditional Lifting mechanism it proposes to select the single-drive four-lifting Lifting mechanism with high transmission precision,and design and calculate the power system,gear rack and positioning accuracy of the Lifting mechanism.Static analysis of key components of the lifting system was carried out.In view of the advantages and disadvantages of the traditional transmission structure,this paper proposes that the transmission structure uses a linear module for transmission.Through the selected design structure,the deflection of the linear module is checked,and the strength and stiffness of the transmission shaft are checked by finite element analysis.Static analysis of other key support components.In this paper,the modal analysis of the supporting structure and the top pin structure is carried out,and the multi-objective optimization method is used to optimize the design of the profile,and the optimized parameters meet the design requirements.Finally,the experimental machine was assembled,and the cleaning performance of the equipment was verified on the test sample by using the cleaning principle of the ultrasonic cleaning equipment.By changing the conditions of the test conditions,the particles on the glass substrate were removed,and the removal rate of the particles before and after cleaning in each working condition was calculated.By comparing,the best working conditions were selected to verify the cleaning performance.