| This thesis is sponsored by National Natural Science Foundation program:"Research on Key Basic Problems to Improve the performance of Micromanipulation Robot"(No.61573093).In recent years,micro/nano positioning technology has a high speed development.Whether in the aerospace,medical,communications,precision manufacturing or in the defense industry,instruments and meters,micro-nano positioning technology is used.PZT is a high precision actuator mainly for micro/nano positioning,PZT directly determines the performance of the micro-nano positioning technology,and the performance of piezoelectric ceramics is directly controlled by piezoelectric ceramic power supply.So,PZT power supply is the key components of micro/nano positioning technology.Aiming at the PZT of 2-DOF symmetrical parallel microstage,for the PZT power supply on the market has the problem,such as the number of channel is small,the human-computer interaction is single and the integration is low,the paper designs a set of touch screen and PC control PZT power supply,with four channels.And the paper applys it to the measurement and control system of the microstage.The main research contents and results are as follows:(1)Firstly the paper analyses the two kinds of PZT power supply.One is a kind of charge driven and the other is a kind of voltage driven.The paper summarizes the research of the PZT power supply at home and abroad,and analyses the respective principle and advantages and disadvantages.Then the paper analyses the PZT power supply products on the market at home and abroad,and lists and analyses their respective parameters.Finally it is concluded that the voltage driven scheme is superior,and it is easier to be done.So the paper adopts the voltage type.(2)The measurement and control system of the microstage are analyzed,and then the overall scheme of PZT power supply is determined.It mainly includes the chassis,upper machine,touch screen,DSP,four roads 16 high precision DAC,voltage follower,high-order low-pass filter,linear amplifier circuit and power supply.The power supply supplies 200V voltage,plus or minus 15V dc voltage and precision 5V voltage.The paper designs a chassis for the PZT power supply,and analyses EMC.Finally the paper determines that length is 270 mm,the wide is 200 mm and the height is 70 mm.The shell material is pure iron,and the wall thickness is 1 mm.The cabinet reaches the electromagnetic shielding requirement of the civil case by calculation.(3)Aiming at the hardware circuit of PZT power supply,first the paper adopts the OP07 and PA85 chips to form secondary amplifying circuit,and completes the circuit stability analysis,the distribution of the parameters,and simulation in the Multisim 12 software.Finally using the Altium Designer software,the paper designs PCB,and work out the object.The paper uses AD823AR chip to design the voltage follower,and completes the test.Then the paper uses NE5532 to design the fourth-order low-pass filter,and material processing is completed.Linear regulator circuit is designed by using the LM7815 and LM7915.REF02 chip is adopted to design a precise benchmark + 5V voltage source.And the paper completes the corresponding circuit simulation and physical processing.Eventually the 200V voltage is designed by using the LT3758 step-up switching power supply.(4)Aiming at the control system and its software design problems of the PZT power supply,this paper completes the design of the signal generator,based on DSP and DAC8534 with the SPI interface,and completes A/D acquisition system based on the DSP with 16 roads 12 bit A/D sampling,and completes the D/A and A/D acquisition for joint experiments.The experimental result meets the requirements.With the help of the C#language,the paper completes the host machine interface for the user to easily use PZT power supply,and realizes the communication with DSP.At the same time,the paper designs the touch screen,and completes the touch screen communication with DSP through the serial port communication.The paper completes the processing of weak signal using hardware filter circuit,hardware amplifying circuit and LMS adaptive filtering algorithm.And also the paper compares the filtering algorithm with wavelet filter and wavelet entropy.The paper respectively simulates the signal-to-noise ratio 10dB,-9dB and-2dB signal.finds that the LMS adaptive filtering algorithm is apparently superior to these two kinds of filter algorithm.Aiming to the problem of closed-loop control of the microstage,this paper uses the position type PID control,and applies it in the DSP.According to the hysteresis nonlinearity of the PZT,this paper establishes an improved PI model and inverse model based on PI model.And then the paper uses the MATLAB to simulate,the simulation result shows that the method used in the open-loop control system of PZT can eliminate the hysteresis nonlinearity of PZT.(5)The paper tests the PZT power supply.First the paper tests the performance parameters of multiple channels,and it is concluded that the several channels performance is basically consistent.Then the paper chooses a channel and firstly tests the PZT power supply no-load performance parameters,calculates that the nonlinear degree is 0.105%and the maximum ripple is less than 15m V.It can be seen that the static performance of the channel is good.And then the paper tests the dynamic performance.The paper tests the output sine wave for example,the effect of follow character is very good,the waveform is stable,and it almost has no clutter.The next experiment is to test the PZT power supply with PZT,and compares with Huibo HPV similar products.It is concluded that the drive ability is better than Huibo products,and the human-computer interaction is more diverse,the number of channel is more,the integration degree is higher.According to the hysteresis nonlinearity of the PZT,the PZT power supply has been designed on the basis of using the open-loop inverse compensation method to do experimental test.The result shows that the designed PZT power supply eliminates the hysteretic nonlinear problems of PZT.Finally the paper applies the PZT power supply to the measurement and control system of the microstage,using the closed loop control.The paper gets the conclusion that the drive power controller can achieve the maximum error rate 0.4%,and can track the sine signal.It illustrates that the design of PZT power supply meets the microstage and achieves the desired design requirements.(6)The paper summarizes the research work of the thesis,and puts forward some problems which need to be studied further,and the follow-up work of the PZT power supply is discussed.Finally the paper summarizes the innovation points of this paper. |
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