Finite Element Analysis Of The Rotor For Dry Scroll Vacuum Pump

Dry scroll vacuum pump as a clean oil-free vacuum access equipment,it is small,compact,low noise,smooth operation and widely used in various industries now.In the past biological products industry and the semiconductor industry,there is a difficult problem to the users about oil vapor pollution and returning oil in process system.The dry scroll vacuum pump does not need to replace the vacuum pump oil,and its operation vibration is small,smooth operation,low energy consumption,light weight,breaking the general rotary oil vacuum pump range of restrictions.In many areas,it has gradually replaced the ordinary rotary oil vacuum pump.In this paper through establishing the three-dimensional solid model of dry scroll pump,at the same time using the ANSYS finite element analysis software to simulate the orbiting scroll to achieve some important conclusion,such as obtaining the temperature distribution of the rotor,deformation and external excitation response when the operation of the dry-type vacuum pump is stable.First of all,the author did research on the basic theory of dry scroll pump,expatiaed the history of the scroll machine,introduced the generation and influence on various industries in the course of the study,meanwhile the author developed a detailed discussion on the present massive structure,meshing theory,operating feature and applicable situation of the dry scroll vaccum pump;Afterwards,combining with the entity and the design parameter of the scroll pump,the author used the three-dimensional design software to carry on the whole scroll pump model.Then,combining with the result which was solved from the CFD simulation solution for the flow field of vacuum scroll pump under the condition that wall was adiabatic,the author recieved node temperature in different times as the boundary condition of cyclic loading through coupling with the wall of the flow field,the author analysed the influence of the body temperature’s change on the stress and strain of the whole rotor.Through wall coupling flow field of near wall flow pressure,the author calculated the results of the dynamic vortex disk stress and strain under the action of physical temperature field,the inertia force and mutual coupling;In the end,that can provide us the transient dynamics analysis for data basis through analysing the dynamic vortex disk dynamically and extraction of rotor first six order modal frequencies and mode shapes.Taking the axial gas forces as the input load,the author carried out the rotor’s Harmonic response analysis about the deformation law of the rotor under the action of axial gas forces,avoided the phenomenon of excessive clearance caused by forced vibration.