Computer Simulation And Modal Analysis Of Oil-free Scroll Vacuum Pump

With the continuous development of the semiconductor industry, biopharmaceutical manufacturing technologies and new materials industries, vacuum equipment demand is increasing. Oil-free scroll vacuum pump with its high ultimate vacuum, simple structure, small vibration and good sealing, has been widely used for domestic and foreign enterprises. Developing oil-free scroll vacuum pump which meet the need of state has great significance.The thesis is mainly based on oil-free scroll vacuum pump as study subject. According to heat transfer theory and the measuring temperature data analysis of orbiting scroll and fixed scroll, research the temperature distribution of orbiting scroll and fixed scroll under stable conditions. According to the vortex mechanical theory, analyze the forces of orbiting scroll and fixed scroll under working conditions. Simulate temperature load and force load on the orbiting and fixed scroll under normal working conditions and get the deformation of orbiting and fixed scroll. Apply finite element modal analytical method to analyze orbiting scroll, fixed scroll and box. Prevent operating frequency and inherent frequency coincide and avoid resonance. First, simulate the temperature load on the orbiting and fixed scroll under normal working conditions and establish steady-state temperature field. Second, centrifugal force and gas force on the special engagement position of orbiting and fixed scroll is calculated. The deformation of orbiting and fixed scroll is known by the method of thermal-static analysis. Last, the former six order inherent frequencies and mode shapes of orbiting scroll, fixed scroll and box are calculated by the method of finite element modal analysis. Prevent operating frequency and inherent frequency coincide and avoid resonance phenomenon.The deformation of orbiting scroll and fixed scroll is calculated by the method of thermal-static analysis. Inherent frequencies and mode shapes of orbiting scroll, fixed scroll and box is known by the method of finite element modal analysis. All these work provides a theoretical basis for improving and optimizing oil-free scroll vacuum pump.