Research And Design Of Power Quality Monitoring System In Semiconductor Manufacturing Plant

Power quality is the key to the stable operation of electrical equipment.In semiconductor manufacturing companies,because of the precision of lithography equipment and other equipment,the requirements for power quality are higher.In order to determine the relationship between the defective rate of semiconductor production and the power quality of the distribution network,this project designed a power quality monitoring system for semiconductor manufacturing plants.The system can effectively monitor the power quality of all transformer distribution nodes in the plant area.Based on the research of power quality detection devices at home and abroad,this paper puts forward the key technologies that need to be used in this design.According to the specific project background of this topic,the overall design of the power quality monitoring system is proposed.It discusses the design criteria and principles of the power quality monitoring system and determines the design requirements for this topic.It analyzes the overall structure of the power quality monitoring system and draws a diagram of the overall structure of the power quality monitoring system.It concludes with a comparative analysis of the power quality monitoring unit design.Through the analysis of the performance of related products at home and abroad,combined with the design requirements of this topic,it determines the choice of the combination of embedded IPC and DSP control board.The paper mainly analyzes the hardware design of the power quality monitoring unit.It discusses the hardware structure of the power quality monitoring unit.It designs a scheme based on DSP controller plus embedded integrated touch screen and a scheme based on power quality detection module plus embedded integrated touch screen and gives the overall structure of the solution.It provides a detailed circuit schematic design for a DSP-based controller solution.It analyzes the comparison and selection of the main devices,including the selection of the ADC sampling chip,the comparison selection of the TMS320F28335 processor,and the comparative selection of synchronous sampling methods.It gives the circuit schematic design of each part of the circuit,including the circuit design of the analog data acquisition part,part of the circuit design of the phase locked loop,part of the circuit design of the ADC chip,part of the circuit design of the DSP controller and the circuit design of the power supply part.Finally,select the RS-485 fiber converter to realize the optical fiber transmission of RS-485 communication.At the end of this paper,the hardware design and test of power quality monitoring unit are analyzed.It discusses the design of the most critical ADC sampling flow chart design and RS-485 communication flow chart design and draws a detailed program flow chart.It focuses on the analysis of the overall functional test of the power quality monitoring unit.Through comparative analysis with the standard meter,it is determined that the measurement accuracy of power quality related parameters meets the requirements.