The Surface Acoustic Wave Temperature Sensing System Applied To High Voltage Electric Cabinet

As the key equipments of the power system,High Voltage Switchgear need a reliable and economical real-time temperature measurement system to ensure the reliability of the power system because they work in the condition of high temperature and high voltage for long time,and with its characteristics of passive and wireless the sound acoustic wave(SAW)temperature sensor meets the demand?Based on SAW technology,the paper designs the set of sound acoustic wave resonator(SAWR)temperature sensor for High Voltage Switchgear,and solve the process problems in manufacturing the temperature sensor,which make the sensor being mass produced?In this paper,the piezoelectric properties of the piezoelectric materials were studied?Based on the requirements of the surface acoustic wave temperature sensor for piezoelectric materials,four kinds of common piezoelectric materials are compared,including the material's TCF and the temperature sensors' frequency temperature curve and echo signal,which are made of four kinds of materials?Finally,YX quartz is selected to produce the surface acoustic wave temperature sensor?In this paper,the layout design process of SAWR temperature sensor is studied,and the design scheme is optimized according to the performance of the device,which eliminates the influence of parasitic response on device performance?In this paper,the fabrication process of the SAWR temperature sensor is studied,and the process flow and process difficulty of each process are analyzed?According to the problems encountered in the process,practicable solution is proposed:studying cleaning process and evaporation process to solve the problem of poor adhesion of A1 film on the surface of the substrate;by adding the correction mask in the right location of the evaporation equipment to solve the poor film uniformity in the evaporation process;through coating Si02 film in the chip surface to make it free of the damage from the process or the process environment;fixing the single-ended SWAR temperature sensor' s process condition,and according to the two typical failure modes of the wire bonding process,feasible solution is put forward?In this paper,the frequency temperature curve,measuring accuracy and measuring distance of the SAW temperature sensor are tested with the reader circuit?The test results reach the level of similar products in foreign countries?In view of the possible problems encountered by the sensor in practical application,put forward the practical application of the solutionAt the end of the paper,the paper summarizes the whole research work,analyzes the characteristics of this topic,points out the shortcomings and points out the way for the future work?...