Structure Design And Performance Simulation Of Aerostatic Motorized Spindle For Dicing Machine

Dicing machine as dicing processing equipment affects the development of semiconductor and LED industry.Domestic dicing machine market has been occupied by foreign precision automatic dicing machine,so the development of the leading international dicing equipment is very necessary.The Aerostatic Spindle is one of the key parts of the grinding wheel cutting machine.Therefore,the structure design and performance simulation of the Aerostatic Spindle used in the drawing machine are designed in this paper.The main contents of this paper are as follows:(1)The overall structure of the electric spindle is determined by the selection of the motor and the bearing.On the basis of the overall structure,the cooling,sealing,carbon brush and gas lock mechanism of the spindle are designed.Finally,the structure design of the Aerostatic Spindle is completed and a three-dimensional model is established.For the design of the electric spindle,the selection of the standard parts and the material selection of the non standard parts are completed.Then the processing technology is planned for the non standard parts,and the processing of some parts has been completed.(2)The aerostatic bearing of motorized spindle needs to complete the design of detail dimensions on the basis of the existing integral structure.In this paper,the design calculation of aerostatic bearing is completed by the classical engineering design algorithm of aerostatic bearing,which provides a basis for the simulation analysis,and the bearing stiffness and other properties are estimated,and the results are compared with the results of the simulation analysis.(3)In the process of structural design and calculation,the structure design of aerostatic bearing is gradually improved and completed.From the standpoints of load-carrying,rigidity and function,it was decided to use four double-row radial bearings and a pair of thrust bearings.For the convenience of processing,positioning and assembly,a thrust bearing and four radial bearings are designed into one body.The gas chamber is designed to reduce the diffusion effect at the connecting part.The gas circulation circuit is designed to ensure the normal use of the bearing,and the small hole part is designed to avoid machining small holes on the cylindrical surface.(4)The simulation analysis of aerostatic bearing has been completed by software ANSYS and FLUENT.The gas flow field is extracted from the bearing model as the simulation model of the aerostatic bearing,and the results of the design are verified by the actual working condition as the boundary condition.By changing the working pressure,the diameter of the hole,the thickness of the gas film and the size of the eccentric,the bearing model is optimized according to the simulation results.