Design And Simulation Of Bending Mechanism Of Synchrotron Radiation Focusing Mirror

With the rapid development of synchrotron radiation optics,it is possible to conduct nano-scale high spatial resolution experiments,which imposes higher requirements on focusing techniques of synchrotron radiation beamline.The radiation used in synchrotron radiation is mainly located in the X-ray band.At present,X-rays often focused by bending mirror with grazing incidence at domestic and foreign.This thesis focuses on the design of bending mechanism of the synchrotron radiation focusing mirror.The design theory of bending mechanism was introduced,and the bending mechanism have been designed and verified.We analyzed the influence of the theoretical slope error on bending mirror,and proposed a gravity compensation method by couples combined with multi-point forces.The main contents can be listed as follows:1.Based on the design theory of bending mechanism,the effective length,maximum couple and theoretical surface-shape of bending mirror are calculated.The bending mechanism have been designed and verified.The finite element analysis of bending mechanism in vertical focusing shows that,when mirror gravity compensated by couples combined with one-point force,the root mean square(RMS)slope error of bending mirror is 0.461 μrad.2.We derived the theoretical slope of bending mirror.Through the bending mirror slope comparison between theoretical and finite element analysis,we analyzed the effects of bending radius,mirror width,mirror height and cross-section shear force on slope errors.The bending mirror slope comparison between theoretical and finite element analysis shows that the slope error is increasing with the increase of bending radius,and the slope error is increasing with the increase of cross-sectional shear force.When the ratio of width to length or the ratio of height to length is large,the bending mirror does not satisfy the assumption of long-straight beam,and the slope error increases rapidly.3.We derived the theoretical slope error of bending mirror induced from gravity,and a method of gravity compensation by couples combined with multi-point forces is proposed.The RMS slope error of bending mirror caused by gravity is 4.693 μrad,and with the compensation of one-point,two-point,three-point and four-point forces combined with two couples,the minimum RMS slope error is 0.085μrad,0.028μrad,0.012μrad and 0.007μrad,respectively.The comparison between couples combined with multi-point forces and multi-point forces shows that when two couples are applied to the both ends of mirror,the corresponding compensation forces decreases,and the slope error of couples combined with one-point forces,couples combined with two-point forces,couples combined with three-point forces and couples combined with four-point forces are 36%,52%,61%and 68%of those without couples.Obviously,the compensation method of couples combined with multi-point forces is advantageous to multi-point forces compensation method.