| The electrochemical micromachining technology utilizes the principle that removes the material by ion under the electric field in the electrolyte to realize microstructure processing.During the processing,the tool electrode does not come into contact with the workpiece,there is no cutting stress,requirement for the hardness and wear resistance of the electrode are low,and the surface quality of the processed workpiece is good,without burrs and surface defects,which is beneficial to the superhard material processing.In this paper,a movable template electrochemical micromachining method is proposed.Compared with the column electrode and mask processing method,the difficulty of electrode preparation and the complexity of processing operation are reduced,and the processing efficiency is improved under the condition of improving processing precision.The principle analysis of the movable template micro-electrolysis machining is carried out,and the mathematical model of the processing principle is established.The effects of different pore sizes and different electrolyte concentrations on the steady-state voltage of the system under the step signal are studied.The effect of micropores on electric field strength and current density are analyzed by electric field simulation.The tool electrode of the movable template electrochemical micromachining is designed.According to the electrode processing characteristics,the selection and processing of the electrode parts are completed.The test parameters of the electrode template made by different materials are optimized,and the clamping device is improved.The assembly of the tool electrode is completed.According to the needs of experimental processing,a micro electrochemical processing system is built.Through the micro-hole experiment of the movable template micro electrochemical processing,the effects of electrolyte,pulse voltage,pulse frequency and other parameters on the processing results are studied,and the processing parameters are optimized to improve the processing accuracy and efficiency.On the basis of micro-hole processing,VB software is used to write the motioncontrol program,and the processing experiment of the micro-groove is carried out.The problems occurred in the experiment process are analyzed,and the solution is proposed.High precision machining of the groove. |