Research On Composite Micromachining Of Laser Ablation And Electrolysis Of Micro Groove

With the micromechanical and micro-electronic-mechanical-system(MEMS)widely used in various fields,the manufacturing technology of mechanical and electronic equipment is developing towards high precision and miniaturization.Micro groove is widely used in heat dissipation of high heat flux devices or surface lubrication for the function of increasing heat dissipation area,storing lubricant and reducing resistance,but there are still some problems such as small machining size,high precision requirement and processing difficulty.Laser ablation machining and micro-electrochemical machining have unique advantages in the field of micro machining,but the laser ablation machining has the problem of heat affected zone and low machining precision,the micro-electrochemical machining has the problem of low processing efficiency.In order to machine micro groove efficiently and precisely,a new method of comprehensive micromachining of laser ablation and electrolysis was proposed.This paper is entitled " Research on Composite Micromachining of Laser ablation and Electrolysis of Micro groove ",and the technology of laser ablation and microelectrolysis composite machining of micro groove is studied.In the machining process,the basic morphology of the micro grooves was rapidly processed by laser ablation machining,and then the surface recast layer of the micro grooves was removed by the microelectrochemical machining.The surface accuracy and properties were improved.This paper reviews the research status and progress from two aspects: micromachining technology and the application and processing technology of microgroove.The main contents include:(1)The mechanism of laser ablation and microelectrolysis composite machining and the stress and deformation of cathode electrode under electrolyte scouring were studied.The minimum monopulse energy of laser ablation of stainless steel was calculated and the dissolution characteristics of stainless were studied.The finite element analysis software was used to simulate the deformation of the micro-electrode electrode under the scour of electrolyte.The results show that the maximum deviation of the tip is no more than 0.029?m,which meet the requirements of micro electrochemical machining.(2)According to the machining characteristics and the processing requirement of the micro grooves,the CNC micro electrochemical machining equipments was built.The motion system,the electrochemical machining slot,the clamping mode of workpiece and cathode electrode,the detection system,the electrolyte circulation system and the control system were designed,and the pulse power was selected as the electrochemical machining power supply.The CNC micro electrochemical machining equipments can realize the manufacturing of straight groove,ring groove,space spiral groove and other microstructure.(3)The study of laser ablation and microelectrolysis composite machining of micro groove on stainless steel was performed.The influences of laser ablation path,pulse width,scanning speed,machining power and processing times on the form accuracy and surface morphology of micro grooves were studied,and a group of optimal machining parameters were obtained.The influences of various machining parameters on the surface morphology and processing efficiency of micro grooves were studied,such as electrolyte composition and concentration,electrolyte scour mode,machining path,cathode electrode feed speed,pulse voltage,frequency,duty cycle and so on,and a group of optimal machining parameters were obtained.Finally,the micro groove with length of 400 ?m,width of 220 ?m and depth of 120?m was processed,whose surface roughness decreased from 5.36 ?m to 1.23 ?m compared to that by laser machining;and whose machining efficiency is 2.3 times equal to that by microelectrochemical machining.