Design And Performance Analysis Of Hydrostatic Guideway For Precision Machine

Hydrostatic guideway is an important component in precision machine,it has long life,high precision,high stiffness,large bearing capacity and good vibration resistance characteristics.Because the accuracy of ultra-precision machine is largely determined by the performance of hydrostatic guideway,the purpose of this paper was to design a hydrostatic guideway with high stiffness and fast response.To achieve this purpose,the design and performance analysis of hydrostatic guideway for ultra-precision machine were carried out.The main tasks are as follows:Through studying the characteristics of various hydrostatic guideways and restrictors,the hydrostatic guideway and restrictor suitable for this subject are selected.Based on the empirical formulas,the oil cushion and restrictor are designed.The characteristics of bearing capacity,stiffness and damping are analyzed by the analytic method and finitedifference method,and the influence of different factors on the performance is analyzed.The model of the flow field was built by 3D modeling software.Based on FLUENT,the computational fluid dynamics(CFD)was carried out to simulate the pressure and temperature distribution of the flow field,and to analyze the influence of supply pressure and load on the flow field distribution.Furthermore,the bearing capacity and flow rate were analyzed according to the simulation results of flow field.Comparing the computational fluid dynamics with the numerical method,the flow area coefficient was corrected.In this paper,a separated hydrostatic guideway was designed.Analyzed the advantages and disadvantages of different oil chambers in the horizontal direction,and completed the structural design of hydrostatic guideway.Based on the computational fluid dynamics results,the temperature effects can be ignored.Considering the fluid-structure coupling effect,the deformations of hydrostatic guideway under different limit conditions were studied.In order to avoid possible resonance in advance,the modal analysis of hydrostatic guideway was carried out.Finally,in order to analyze the actual performance of the hydrostatic guideway,the scheme of hydrostatic guideway test-bed was proposed.In this scheme,the drive unit,limit locking device and signal acquisition system were designed.