Research And Development Of 36-inch Hydrodynamic Suspension Polishing Machine

With the rapid development of nano-materials and nano-technology,the nano-film is widely used in engineering field.Universally used nano-film preparation methods nowadays,such as ion-beam sputtering deposition,magnetron sputtering deposition,electro deposition,chemical vapor deposition,molecular-beam epitaxy technology,colloid chemical deposition and so on,atomic ultra-smooth surface of the all need deposition substrate,and the film quality is mainly influenced by the properties of substrate surface.Therefore,improving the quality of the substrate surface and the preparation of atomic ultra-smooth surface of high quality is of great significance to the research of nano-film.By the requirement of atomic ultra-smooth substrate surface to grow nano-film,we presented a new polishing method named hydrodynamic suspension polishing,we also researched and developed a 36-inch hydrodynamic suspension polishing machine based on it,and a series of experiments and research were performed by using it.The main work is as follow:(1)The principle of hydrodynamic suspension polishing was analyzed.The numerical simulation of the fluid in the polishing area was carried out by using Fluent.The results show that the hydrodynamic suspension polishing plate can effectively improve the pressure of the workpiece and distribution of the pressure in polishing area compared with the dynamic pressure floating polishing plate,which theoretically illustrates the feasibility of hydrodynamic suspension polishing;(2)Mechanical design for 36-inch hydrodynamic suspension polishing machine was performed.The main body,the spindle system and the hydrodynamic suspension mechanismwere designed and checked.ANSYS Workbench 15.0 software was used to perform model analysis for upper part of machine,this paper also analyzed and promoted the analysis results.Rigidity and stability were improved after promotion.In addition,the overall control system design of the machine was performed.According to the function and technical requirements of the machine,the hardware system,software system and man-machine interface of the machine are designed respectively to ensure that the developed machine reaching the requirement of high precision control;(3)The hydraulic pressure of the 36-inch hydrodynamic suspension polishing machine was detected and collected,The analysis shows that hydrodynamic suspension polishing plate speed and the upper and lower polishing plate processing gap will have a relatively large impact on hydraulic pressure.This paper selected electrolytic Cu as workpiece,using Nano-MAX machine to prepare previous sample,then using the new machine to prepare ultra-smooth surface sample and compared it with samples prepared by traditional mechanical polishing process.Tested the Cu samples by using sample-presenting-method such as Wyko,SEM.The results show that a ultra-smooth surface of lower surface roughness and better surface topography could be produced by hydrodynamic suspension polishing machine than traditional mechanical polishing process.The feasibility of hydrodynamic suspension polishing method and the reliability of36-inch hydrodynamic suspension polishing machine was proved by the means of mechanical design,control system design,simulation and experiment,sample preparation and characterization.