Devsign Of Hydrodynamic Suspension Polishing Device And Experimental Research

Ultra-smooth surface processing technology, an important part of ultra-precision processing system, is widely applied in high-tech areas such as optical instruments, aerospace,defense industry, high precision mechanical, which is an important embodiment of county comprehensive national strength, science and technology level. With the continuous upgrading products, the requirement of machining quality in these areas will be higher.Ultra-smooth surface processing technology has become a hot research direction of current research on manufacturing industry.Aim to solve the problem of how to obtain high-efficiency and stable ultra-smooth surface, this paper puts forward a new kind of polishing method—hydrodynamic suspension polishing, which could effectively improve the value and distribution of the pressure in polishing area, and benefits the formation of the ultra-smooth surface. The main research contents are as follows:(1)The principle of hydrodynamic suspension polishing was analyzed, and the material removal process during the polishing process was revealed by the surface atoms removal. At the same time, the numerical simulation of polishing area was completed by Fluent, and the position of samples was determined. The results show that the new disk can effectively improve the size of pressure and distribution of the pressure in polishing area by adding the boundary and the storage chute, indicating theoretically the feasibility of hydrodynamic suspension polishing.(2) The hydrodynamic suspension polishing device was designed, which includes optical platform, servo motor control system, clearance control system, polishing liquid control system, polishing disk and a frame structure. The model analysis of polishing disk based on ANSYS Workbench was completed and LMS Test. Lab was utilized to study an experimental modal test to obtain the natural frequency of the polishing device by PolyMAX modal parameter identification, which confirmed that the hydrodynamic suspension device has high stability for polishing.(3)Based on copper samples, the experimental research of hydrodynamic suspension polishing processing was completed. Contrast to the mechanical lapping before the polishingin terms of the surface of TEM micro-morphology, it is confirmed that the hydrodynamic suspension polishing have the capacity to obtain atomically ultra-smooth surface and with little or no sub-surface damage.