Study On The Preparation And Performance Of Light Trapping Front Electrode With 3D Nanostructure

In the film silicon solar cells,textured light trapping substrates are very important and used to enhance light absorption and improve energy conversion efficiency.The favorable trapping substrates not only can improve the scattering of the incoming light and optical path to enhance the conversion efficiency,but also can reduce the interference phenomenon of the incoming light to enhance the response of the solar cell.Under certain conditions,three dimensional?3D?nanostructure is promising not only reduce the thickness of active layer,but also get good optical absorption performance in wide spectrum domain and incident wide angle range.At the same time,it has the advantages of good at excellent repeatability,easy to simulate and change the structure,etc.Therefore,it's very important significance to study it.In order to research different 3D light trapping substrates for thin film solar cells.In this paper,we have taken a detailed study at the preparation method and factors affecting photoelectric properties of 3D porous array and dome array structure conductive front electrode.The main research contents and research results are as follows:?1?We proposed a two-step anodization process to prepare the AAO?anodic alumiunum oxide?templates,and the new composite porous array light trapping electrode were fabricated utilizing both AAO templates and sputtering ZnO thin films.With the regulation of annealing process,the polishing process,oxidation voltage,oxidation time and reaming process parameters,it releases the regulation of the morphology and structure to AAO templates.we get the results of templates change regulation with these process parameters.The experimental results show that:the annealing process and the polishing process improve the order of the AAO template.The second oxidation voltage and reaming time can change the hole diameter and the hole spacing.The second oxidation time is the only factor to impact the depth of nanopore.Through parameters regulation analysis to realize optimized lighting trapping properties of AAO template.This article,the AZO?ZnO:Al?conductive thin film materials was deposited by magnetron sputtering technology over the AAO template too keep the AAO porous array structure.Under certain conditions,3D structure front electrode has good photoelectric properties.Finally,to illustrate the effect of the improvement in the photoelectric properties of the 3D structure front electrode,the electrode was used in the PIN-type solar cells.We know that the solar cell increased light response ability.A Jsc of 14.6 mA/cm²,indicated that the conductive front electrodes offer advantages in solar cells.?2?We proposed the dipping-pulling method for producing monolayer and closely arranged SiO₂ microspheres templates.The expermentals analysis the affection of optical property on different diameters.Reactive ion etching?RIE?was used to change the microspheres spacing.A ZnO film was then deposited by magnetron sputtering on the SiO₂thin film.To ensure good photoelectric properties experiment regulated the ball diameter and spacing.We succeeded in preparation of 3D structure front electrode.Finally,to illustrate the effect of the improvement in the photoelectric properties of the 3D structure front electrode,the electrode was used in the PIN-type solar cells.A short-circuit current density?Jsc?of 13.72mA/cm²,a fill factor?FF?of 61.45%,indicated that the conductive front electrodes offer advantages in solar cells.