Dry Etching Assisted Femtosecond Laser Machining To Manufacture K9 Glass Artificial Compound Eyes

Biological compound eyes attract more and more researchers' attention because of its advantages of wide field of view,low aberration,high sensitivity and rapid motion detection.The machining of artificial compound eyes has received extensive attention due to its potential applications in military,industrial and clinical medicine.Researchers have developed a variety of artificial compound eyes machining methods,including the combination of planar lithography technology and thermal reflow technology,femtosecond laser two-photon polymerization technology,wet etching assisted femtosecond laser processing technology and hot imprint technology.However,these micro-nano structure machining technology have some disadvantages,for example,the combination of planar lithography and thermal reflow is difficult to manufacture threedimensional curved compound eyes,planar lithography technology can't accurately control the exposure angle at the curved interface and effectively prepare the photoresist cylinder structure required for the next hot reflow technology;femtosecond laser twophoton polymerization technology can't quickly manufacture artificial compound eyes with large quantities,because the processing method is point-by-point scanning processing,it takes too long for a large number of artificial compound eyes structures;these processing technology only produce polymer artificial compound eyes,due to the poor mechanical resistance of the polymer,poor thermal stability and poor chemical stability,therefore,in some complicated environments,the optical properties of polymer artificial compound eyes will be seriously affected,and even fail to play its due role.These shortcomings limit the forward development of artificial compound eyes.Because hard materials have the characteristics of high hardness,high stability and strong chemical stability,it is very important to study the artificial compound eyes of hard materials.In this paper,the machining method of dry etching assisted femtosecond laser processing technology and casting transfer technology is proposed,which achieves the efficient preparation of K9 glass artificial compound eyes with good surface morphology and good optical properties.This paper mainly studies dry etchassisted femtosecond laser processing technology to manufacture sapphire concave compound eyes template with high hardness,high thermal stability and chemical stability,K9 glass artificial compound eyes on K9 glass using sapphire concave compound eyes template.The K9 glass artificial compound eyes after successful transfer has a diameter of 1 cm and a height of 2.3 mm.The K9 glass artificial compound eyes have more than 190,000 lens,each len has a diameter of 20 ?m and a height of 1.5 ?m.The K9 glass artificial compound eyes has good imaging and focusing effects,and the field of view angle reaches 90°.The combination of dry etching assisted femtosecond laser processing technology and casting transfer techn ology will provide a new idea for micro-nano machining of hard materials.