Programmable Control Of Femtosecond Laser Machining Platform

Femtosecond laser machining is an advanced fabrication technology that uses femtosecond laser pulses to interact with matter,in order to change the physical and chemical properties of matter.Owing to the ultra-short pulse duration and ultra-high pulse energy,femtosecond laser machining has no heat-affected zone,leading to an outstanding “cold processing technique”.At the same time,femtosecond laser can be used to process various materials,including semiconductors,transparent materials and so on.In addition,since the femtosecond laser can generate the multiphoton absorption with the material,we can fabricate the three-dimensional microstructure that breaks the diffraction limit of the objective lens,with the extremely high processing precision.Therefore,femtosecond laser machining has various applications in physics,chemistry,materials science,biomedicine,micro-optics and aerospace.The thesis is targeted for the smart control of the femtosecond laser machining platform enabled by the self-developed software,in order to provides high-precision and high-efficiency micro-machining.The research efforts involve the design and build-up of the femtosecond laser machining platform and the debug of corresponding software.Then,the micro-structure is successfully processed on the multi-core fiber facet,which verifies the feasibility of the control software.The main research outcomes are submarined as follows,(1)We summarize the development of femtosecond laser and the advantages of femtosecond laser machining.The recent progress of femtosecond laser machining platform is reviewed in details.(2)The interaction mechanism between femtosecond laser and transparent material is described.Then we introduce the operation principle and functions of corresponding devices for the construction of the femtosecond laser processing platform in details.Finally,a femtosecond laser processing platform is successfully developed.(3)We design and develop the programmable control software and introduce its control principle and related functions of corresponding software modules.Consequently,the smart control of the femtosecond laser processing platform is realized with the help of control software.In experiment,we have successfully dilled six micro-holes with a successive depth difference at the accurate position of 7-core fiber facet.The depth of micro-holes is 5.36μm,10.4μm,15.05μm,20.2μm,24.42μm and 30.53μm,respectively,and the maximum deviation is 0.53μm which is within the allowable deviation range.Thus,the experimental results of micro-structure inscribed on the 7-core fiber facet can verify the function of control software.