Hybrid Simulation Of The Multisource Driven Inductively Coupled Plasma With The Diffusion Chamber

To generate energetic plasma in ITER Project,auxiliary heating method is needed,whichis Neutral Beam Injection(NBI)heating.Because of the high neutralization efficiency,negative hydrogen ion source is used.Nowadays,the study of negative hydrogen ion source is made progress.But the multisource driven negative hydrogen ion source has not been studied.The hybrid model(global model and fluid model)is used to simulate the Ar source plasma to check its reliability.First,global model is used to simulate the effect of pressure,power and size of source area on the physical property of plasma.Then,3D fluid model by COMSOL is used to simulate the effect of pressure,distance between sources and size of sources on the property of plasma.This paper gets the following conclusions:(1)In case of other discharge conditions unchanged,electron density is higher and electron temperature is lower at higher pressures in source area;electron density is higher and electron temperature is invariant at higher power in source area;electron density is lower and electron temperature is lower at bigger size of source area and the variation tendency of election density is obvious at high pressure and the variation tendency of election temperature is obvious at low pressure.(2)In case of other discharge conditions unchanged,electron density is higher at higher pressures in diffusion area and its distribution is more uniform at low pressure.Electron temperature is lower at higher pressures in diffusion area and its distribution changes rapidly at high pressure.(3)In case of other discharge conditions unchanged,the drift and diffusion of electron in diffusion area is more obvious at smaller distance of sources,especially in the middle.And in the xy section,distribution of electron density is concentrated in the middle.Electron temperature change more slowly along z direction at smaller distance of sources.And in the xy section,distribution of electron temperature is concentrated in the middle.(4)In case of other discharge conditions unchanged,the drift and diffusion of electron in diffusion area is more obvious,electron density is lower and its distribution is more uniform at bigger size of sources.Electron temperature changes more slowly along z direction and its distribution is more uniform at bigger size of sources.