Study On Laser Direct Writing Of Metal Micro-nano Structures

Metal micro/nanostructures have significant applications in microelectronic devices,metamaterials,MEMS,and SERS.Therefore,the processing and manufacturing technology for metal micro/nano structures is a research hotspot.Laser trapping micro/nano directwriting technology has application potentials in fabrication of high-resolution metal micro/nanostructures,especially complex three-dimensional(3D)metal structures.In this dissertation,the influencing factors and control mechanisms of laser trapping micro/nano direct-writing of silver structures were investigated with a source of femtosecond laser for further improving the processing resolution of this technology.Several silver 3D micro/nanostructures were also fabricated by using of this technology for investigating the fabrication ability of this technology.Firstly,an 800 nm femtosecond laser was used to capture dispersed silver nanoparticles in water on the basis of the synthesis and characterization of silver nanoparticles.The effects of the laser focus height,laser power,and scanning speed on direct-writing of silver micro/nanostructures were investigated.The direct writing of the silver line with a minimum line width of 305 nm was achieved by rational selection and adjustment of laser parameters.The conductivities of silver wire were tested.The resistivity of the silver wires is about 25 times that of bulk silver,and they have good conductivities.Secondly,the experimental setup was improved to satisfy laser trapping micro/nano direct-writing of silver structures with different wavelength.The influences of the laser wavelengths on the fabricated silver lines were systematically studied by combining theoretical calculations.At wavelength of 700 nm,a silver line with width of 286 nm was obtained by laser writing.Finally,several silver structures square with grids,rhombic grids,and dot arrays were fabricated by using laser trapping micro/nano direct-writing technology.Several 3D rectangular table structures were also written by using this technology.The fabrication capability of this technique in direct writing of two-dimensional(2D)and 3D structures was investigated.It lay the foundation for writing 2D and 3D functional structures and devices by using this technology.The control mechanism of laser trapping micro/nano direct-writing technology,and the direct writing of high-resolution silver lines,the 2D and 3D structures were studied in this dissertation.It will provide some thought and method for the study of laser trapping micro/nano direct-writing technology.The achieved silver micro/nano structures will have certain applications in flexible micro/nanoelectronic devices,SERS,and metamaterial structures.