Research On Optical Interference Testing Of The Thickness Uniformity Of Thin Glass And Aspheric Surface

Optical market is in a ferment,the application of the optical element in our life and production are becoming increasingly widespread,not only for optical engineering field,but also has been widely used in microelectronics,communication,a variety of domains such as aerospace engineering.Optical components manufacturing and testing are inseparable,in numerous detection method,the interference method to detect the quality of optical element parameter has high precision,non-contact and easy operation etc,are widely used in rapid measurement and high accuracy detection.In this paper,the thickness uniformity of thin glass is studied by using the characteristics of short white light coherence length and the use of Michelson interferometer.In the experiment,two pieces of thin glass of the same material were inserted in one optical path of the interferometer,by comparing the white light interference pattern produced by the two pieces of thin glass,the thickness uniformity of the thin glass could be obtained,the large thickness difference was further measured.The detection method is convenient and fast and can improve the accuracy.Based on the theory of light interference,The method of testing concave aspheric surface by using computer-generated hologram(CGH)has been studied.We try to combine the CGH with the traditional optical compensators to simplify the null test system.With the help of optical design software Zemax,we give design examples and their corresponding results.compared with the traditional lenses compensators,the compensator of ours has only one lens with CGH to realize test,to ensure precise measurement at the same time reduces the test cost,shorten the test cycle.The detection of the thickness uniformity of thin glass and aspheric surface are based on the principle of optical interference,and the quality of optical elements is evaluated by comparing the interference results.Compared with other experimental methods,the optical interference method is used to detect the thin glass thickness uniformity and aspherical surface,not only achieve the high precision,non-contact detection effect,but also optimize the structure of the detection system,saves testing time and related costs.