Study On Floating Potential Dielectrophoresis Assembly Of Nanoscale Electronic Devices

Floating potential dielectrophoresis(FPDEP)that applied to the electronics manufacturing have many advantages,such as simple control strategy,low cost,non-maleficence and high-yield.In the manufacture of large assembly,the classical dielectrophoresis method needs many separation electrode lead by reason of the device size and high-density electrode,and it will bring about many problems to workmanship.This thesis uses the DEP assembly method based on floating potential that generated from microelectrode array.Establishing the driving force model of five kinds of typical nanotube/nanowires(i.e.,Ag nanowire,ZnO nano wire,SWCNT,Cu nano wire and CuO nano wire).Because the sources are connected together,when the alternating electric field is imposed on source and gate,each drain will generate floating potential by capacitive coupling with gate.Consequently,the regenerated alternating electric field between source and drain will drive nanotube/nanowires moving to each pair of electrodes,realizing the large-scale assembly of silicon wafer.The main work of the thesis are the followings:(1)The principle of FPDEP,includes the distribution of electric field,the nanotube/nanowires polarisation as well as the FPDEP force models.(2)Considering the disturbance effect of the Brownian motion and the fluid flows induced by the electrothermal and electroosmosis in the FPDEP system.Three interference factors have been modeled and analyzed,in consequence,it will provide a favorable analysis method of the FPDEP,and weaken or avoid the bad effect of the electric fluid dynamics.It may improve the operation controllability and practicality indeed.(3)With the investigation on the mechanism and experiments of FPDEP assembly of the five typical nanotube/nanowires,it is presented that the nanotube/nanowires structure and the related polarization model is the dominative mechanism for the frequency spectrum of nanotube/nanowires FPDEP assembly.The mechanism shows that there exist highest formation rates of each kind of nanotube/nanowires FPDEP assembly,and the highest formation rates are relate to the frequency of electric field and the size of nanotube/nanowires.Matlab has been used to simulate the the best electric field frequency.This thesis provides detailed information on the mathematical model of floating potential.From the model of floating potential knows that the potential coupled in to the drain are mainly relate to the thickness of SiO2 and the drain area.The Multi-physics has been used to simulate these two parameters.The micro electrode chip source of FPDEP has been designed.(4)At last,the testing platform has been designed to assemble the five typical nanotube/nanowires based on above analysis result respectively.The FPDEP method not only provides effective theoretical guidance and interpretation of experimental research of fabricating nano device based on these five kinds of typical nanotube/nanowires assembly simultaneously,but also shows great value in both research and commercial purposes.