Application Of The Quantum Evolutionary Algorithm In Researches Of EUV Multilayer

According to the shortcomings in the characterization and design of EUV multilayer with the genetic algorithm(GA),which are large population,slow convergence and poor accuracy.This thesis demonstrates an application of real-code quantum evolutionary algorithm(QEA)in the characterization of periodic EUV multilayer and design of broadband multilayer.At first,the parameters of periodic Mo/Si have been evaluated with the fitting of grazing incidence X-ray reflection(GIXR),which are based on the real-code QEA.Secondly,the EUV multilayer with a broad wavelength band has also been designed based on the real-code QEA.Finally,the results based on the real-code QEA have been compared with that based on the real-code GA.After the comparing and analyzing,the results demonstrate:(1)for the fitting of GIXR,the real-code QEA which has a smaller population can obtain the parameters with a good convergence and better accuracy in the four-layer model,and the accuracy of thickness can reach 0.1nm;(2)for the design of broadband multilayer,the real-code QEA with a smaller population can supply similar convergence and accuracy with that based on real-code GA,The wavelength of bandpass is 13-15nm(FWHM is about2.3nm),and the reflectivity can reach 25%.In conclusion,the related researches demonstrated the potential value of the practical application of real-code QEA,and the foundation has been laid for the research in the next-step.