Research On Sensors Based On Copper Oxide Nanomaterials

With the continuous advancement of China's major strategies,such as the Internet of things and artificial intelligence,the need and demand for the sensors have been greatly improved.Due to the unique structural features,nano-materials has many novel physical and chemical properties,which is different from the bulk materials.Nano materials,such as oxides,carbon based nanoparticles,etc.,can be used as sensitive materials to the development of high performance sensors,and the related researches have very important academic and industrial values.Compared with the large area controllable growth of nanostructure arrays,the discrete nanostructures have higher integration with the existing advanced semiconductor device design and manufacture technology.In the construction of specific devices,it is necessary to efficiently manipulate nanomaterials and selectively assemble them to the pre-determined position.At present,dielectrophoresis is considered as a simple and efficient nano-assembly technology and has been widely studied and applied.Humidity and temperature are closely related to the social production and life.CuO is an important P-type semiconductor material.In recent years,the potential sensing applications of nanostructures have attracted wide attention in the academia and industry fields.In this work,we employed Cu O nanostructures as sensitive materials,systematically studied the fabrication of the sensing structures via dielectrophoresis manipulation.Based the tests of humidity and temperature sensing properties,we deeply discussed the sensing mechanism of the prepared CuO nanoparticles,and explored the technical path of the performance enhancement through contrast experiments design.The mail contents are given as following.Three different sizes of sheet-like copper oxide nanostructures were synthesized by hydrothermal method,and the morphologies and structures of the nanostructures were characterized.Based on the large amount of experiments,we obtained the parameters of CuO dielectrophoresis manipulation and successfully deposited the prepared CuO nanostructures between the pre-designed Ti/Au electrodes.Based on this,the sensors with the prepared CuO nanoparticles as sensing elements were fabricated,and the humidity and temperature sensing properties,such as sensitivity,repeatability and hysteresis,etc.,were then tested.The results demonstrated CuO nanoparticles had good humidity and temperature sensing properties.Based on the multi-layer adsorption model,comparative analysis of humidity sensing properties of CuO nanostructures with three different sizes was performed,and the impact of the size of CuO sensing nanoparticles on humidity sensing properties was deeply discussed.The results demonstrated that the regulation of the size-depended specific surface area and activity of sensing interface could effectively improve and enhance the sensing performances of the nanosensors.