Research On The Focus Variation Algorithm And Software System For The Measurement Of Surface Topography

The surface morphology of the mechanical parts has a crucial impact on the function of the parts.It is estimated that the failure of 80% of the machined parts is caused by surface morphology.Surface topography measurement is of great significance for surface functional analysis and product quality assurance.The method of measuring the surface morphology of focus variation has the characteristics of high precision,large measurement area,fast speed and no damage to the surface of the sample.It is suitable for measuring rough surface and surface with complex structure.In this paper,the key algorithms and software systems of vertical scanning focus variation surface topography are studied.The main contents are as follows:1)Based on the analysis of microscopy imaging system,a method which combines wavelet FM operator and Gaussian interpolation is proposed and studied.This algorithm has strong anti-interference ability and has proper focus variation recovery precision and efficiency.2)The three-dimensional robust Gaussian filter algorithm are studied,and a three-dimensional Gaussian robust filtering algorithm with the confidence matrix of the focus variation surface is proposed as the initial vertical weight function.The algorithm is fast and can achieve robust filtering on the 3D surface morphology of the focus variation measurement.3)Based on Visual Studio2010 software development platform,a focus variation surface topography measurement software system was developed.The software system realizes motion control,image acquisition and 3D surface topography recovery,analysis and evaluation in the measurement process.4)Related algorithms and software systems are applied to the self-developed focus variation surface morphological instrument,and the good experimental results are obtained.