Preparation Of Ge-Sb-Se Substrate Optical Waveguide Stripping Method And Process Study

In recent years,the optical information communication with a small power consumption,anti-interference ability of light interconnection technology has aroused widespread concern,and is widely used in military,life,aerospace and so on.As a basic component of an integrated optics,the performance of an optical waveguide device has a decisive influence on the performance of the entire integrated optical system.Sulfur-based glass materials have a wide range of transmission spectra,higher refractive index and low two-photon absorption coefficient,and higher third-order nonlinearity,in optical communications,integrated optical devices,all optical networks and other fields are important The application value,especially in the far-infrared band,has been proven to be an excellent carrier for integrated optics.Waveguide optical devices based on sulfur-based glass materials are suitable for the preparation of nonlinear integrated optics.Therefore,optical waveguides prepared with sulfur-based glass materials have a wide range of applications.But at present,the application of waveguide in the country is still in the initial stage of exploration,the preparation of low loss and high efficiency optical waveguide has great application prospects and significance.The current international popular methods of preparing optical waveguide are particle etching method,dry method,wet etching method,stripping method and so on.In view of the simplicity of the economy and the complexity of the process of preparing the waveguide,we chose the stripping method to prepare the optical waveguide.This greatly simplifies the waveguide preparation process and avoids the purchase of expensive equipment.In this paper,the high-density large-diameter Ge-Sb-Se glass material prepared by Ningbo University's Infrared Materials and Devices Laboratory was used as the evaporation source,and the film was prepared by thermal evaporation technology.The properties of the films and the waveguide morphology were studied.In the process of preparing the optical waveguide by the stripping method,we used the positive glue AZ5214 and the negative glue N244 to carry on thepattern transfer.And the prepared optical waveguides were analyzed by morphological analysis and transmission.The main contents of this paper are as follows:The first chapter introduces the concept and characteristics of optical waveguide and some characteristics and advantages of sulfur-based materials.The research status of optical waveguide at home and abroad is briefly introduced.Chapter 2 introduces some basic knowledge of optical waveguides,including theoretical analysis and numerical methodsThe third chapter mainly introduces the simulation software to simulate the transmission characteristics of different width and height of the waveguide,and use the simulation data to prepare the maskIn the fourth chapter,the preparation process of the stripping method is mainly described,and the advantages and disadvantages of the films prepared by thermal evaporation are analyzed.At the same time,the effect of waveguide preparation using two different properties of photoresist is analyzed and compared.During the preparation process,a heat return process is also introduced to reduce the roughness of the waveguide side.Chapter 5 focuses on some basic tests and representations of films and waveguides.The sixth chapter is the summary of the whole paper,and puts forward the problems found in the solution and the research,points out the shortcomings of this study,and prospects the future development of optical waveguide.