Optimization Design,Manufacture And Performance Of Magnetoresistive Elements Based On Magnetic Flux Concentrators

The accurate measurement of the magnetic field vector information can be used as an important means for the detection and cognition of the space environment..Researchers have put forward higher requirements for magnetic vector sensors that meet the different application environment.They need to develop a new type of sensitive mechanism with high precision magnetic sensor with micro volume,low power consumption,high sensitivity,no hysteresis,high temperature stability of high-precision magnetic sensor.,it is of practical significance to improve or optimize the performance of anisotropic magnetoresistive sensors to meet the requirements of geomagnetic measurements.Therefore,this paper presents a study of magnetoresistive elements based on magnetic flux concentrators structure to improve the accuracy of magnetic field measurement.In this paper,under the circumstances by the theory of the magnetic flux concentrators,caming up with anisotropic magnetoresistive sensing optimization structure.firstly,using ANSYS finite element simulation software simulation analysis for magnetoresistive structure.Then,simulating analysis that The magnetoresistance element with the tip structure is 2.4% higher than the magnetoresistance rate of the magnetoresistive element without the tip structure,and the output linear range is optimized after adding the barber bias structure.Again on the basis of design simulation,the thin film unit was prepared by magnetron sputtering technique.The factors such as vacuum,sputtering pressure,annealing condit ion and interfacial intercalation were studied.Using the four-probe technique to measure the anisotropic magnetoresistance of the sample,the magnetic field strength of 40 Oe range,the magnetoresistive unit sensitivity of about3.52 V / T.Finally,it assembles and tests the magnetic flux concentrators and the magnetoresistive element structure.Show that magnetic flux concentrators have the gond magnetic field amplification characteristic.the area and the length of gap have a inverse proportion.Significantly improved measurement accuracy.