Design Of Millimeter Wave CMOS Transmission Lines Based On SPPs

For millimeter-wave transmission lines domestic and abroad,there still exist some problems mainly manifested in the following aspects:(1)the frequency is not very high,less than 40 GHZ.(2)the line structure is single,confined to the traditional microstrip line and coplanar waveguide structure.(3)the insufficiency of the processing technology,making it stay in the theoretical part.But,with the quick development of CMOS process,nanometer CMOS BEOL process(Back End Of Line)is becoming more and more complex,the metal layer is increasing multiple,and the thickness of top layer metal also is increasing,thus has excellent high-frequency performance,especially suitable for the application of millimeter-wave integrated circuits.On another hand,as the developing of artificial metal surface SPPs,we find that it has excellent characteristics such as electromagnetic field is highly bound spread,especially suitable for combination of transmission line to reduce the loss of related research.To solve above problems,this paper proposes total six different structures of the transmission line,among it the design of the BiCMOS process of artificial metal surface SPPs is a new innovation,and design the other five common popular transmission structures for comparative analysis.Through these six kinds of structure modeling and HFSS simulation,the processing and measuring,can demonstrate the validity of the measurement results,and also get a valuable resource analysis.In addition,in this paper,the design of all transmission line structures can get excellent characteristics of loss and quality in millimeter frequency.In this paper,the research results are as follows:First,I designs five kinds of good performance of transmission line structure based on 0.13 um CMOS technology,respectively the standard MS structure,standard CPW structure,standard GCPW structure,slow-wave SCPW coplanar waveguide structure,finger FCPW coplanar waveguide structure,the artificial metal surface SPPs structure.Second,I designed the artificial metal surface SPPs transmission line structure based on BiCMOS process.According to the simulation results,can obtain excellent characteristics of the loss of 0.078 dB/mm in 0-110 GHZ frequency range,and especially in higher frequency above the terahertz,the structure of consumption growth is very slow,compared with MS,CPW,GCPW structure,the loss of advantage is obvious,it can also be seen from the electric field figure.Third,the optimized structures of millimeter wave transmission lines are processed.After the embedded simulation results will be compared with the measured results,the simulation results are consistent with measurement results,which verified the theory of this article.