Development Of Optoelectrical Integrated Position Sensor

With the rapid development of mobile intelligent devices,intelligent hardware has been developed rapidly.The development of human-computer interaction has become more efficient,friendly and diversified.Proximity and gesture detection is a new type of human-computer interaction.As the mainstream interactive mode is difficult to use touch control,this new human-computer interaction as a supplement is particularly important.At present,ultrasonic position sensor has commonly large components and is hard to be integrated.Compared with these types of position sensors,the optical position sensor has advantages of low power consumption and monolithic integration.The optoelectrical integrated position sensor chip can realize the proximity and gesture detection.In this thesis,reasearch work and innovation are shown as follows:1.The monolithic integrated circuit structure of the position sensor chip was designed.Based on the schematic diagram of the integrated circuit and the principle of optoelectrical devices,simulations and layout design of the optoelectrical integrated position sensor were accomplished.The gain of 92dB and the bandwidth of 3.5MHz were realized.2.Based on 0.18?mGMOS process,a variety of structural types of photo detectors and quadrant photo detectors compatible with the standard process were designed.The various types of photo detectors were tested and the response were 0.1A/W-0.25A/w,which provided a reference for the choice of the struceture.3.Monitoring system of the position sensor was analysed and simulated.The 850nm light source and the 500?m*500?m photo detector were designed for the theoretical model of the monitoring system.4.Test results of the optical receiving circuits were analysed,which was compliance to the simulation results.The gain of 91.98dB and the average distance resolution of 0.1mm were obtained.The chip could realize the vertical distance and the horizontal displacement monitoring,through the analysis of the threshold compared with the measured data.The innovation is shown as follows:With the 0.18?m CMOS process,optoelectrical integrated position sensor chip including hybrid light source,compatible photodetector and signal processing circuit was realized.It is used in the detection of proximity and gesture detection for mobile intelligent devices.