Study On The Gas Sensing Properties Of Three Dimensional Macroporous Inverse Opal Semiconductor Metal Oxides

With the development of industry,the discharge of harmful gases in production and life is more and more important to people's life.Therefore,a wide range of gas sensors are expected,which has a great impact on the performance of gas sensor is the sensor material.The three-dimensional inverse opal?3DIO?due to the characteristics of ordered porous has become one of the hot research direction in the field of materials in recent years by domestic and foreign researchers in recent years.The porosity of 3DIO material can reach 74% in theory,and it can provide enough active sites for gas sensing.Based on the above points,we prepared 3DIO ZnO-Fe₃O₄ composites by template method,and studied the gas sensing properties of Fe doped samples with different proportions.The main contents and conclusions of this paper are as follows:?1?3DIO ZnO-Fe₃O₄ composites with an atomic ratio of Fe/Zn as 0?10%?20% and30% respectively,were prepared.The surface morphology and phase composition of the materials were analyzed by SEM?TEM?HRTEM?XRD and EDS.?2?The acetone gas sensing properties of the samples with different Fe doping ratios were systematically studied.The results show that the 20% Fe/Zn atom doped samples exhibit better gas sensing properties than other samples.?3?The sensing mechanism of ZnO-Fe₃O₄ composites is analyzed.Based on the experimental results,the mechanism of improving the sensing performance of the optimized device is explained by the electron transport and microstructure.