10-40GHz IC On-wafer Test Platformdesign

Advances in semiconductor technology have promoted the development of integrated circuits in miniaturization,low power consumption,high output power and high integration,testing techniques and requirements for integrated circuits are also constantly improving.According to the new test requirements need to design 10-40GHz IC test platform to cater to the engineering application.The platform is a fully testing the chip's electrical parameters on-wafer,can ensure finished product rat of encapsulation,improve the technology of IC production and achieved controls on production process.In this thesis,the parameters of the DUT are analyzed and summarized,and the design scheme of the IC test on-wafer platform is proposed,which is based on the semi-automatic probe station and network analyzer and so on.The whole test platform is composed of two sub platforms,which are multi-function and multi-parameter test sub platform and pulse power amplifier.Through the analysis of the relevant instrument test and calibration technology,the part of the calibration method is optimized,in order to apply in the film test engineering application.In the multi-function and multi-parameters test sub platform,the design of multi-function driver,to provide the different drive signal to meet the needs of the IC test.In pulsed power on wafer test sub platform,the DC probe card bias circuit design solutions to improve the stability of power amplifier test on-wafer,the preamplifier embedded raised driving power of the test platform,the sub platform can test the additional efficiency of the amplifier quickly,the power amplifier to achieve rapid test in the film.The results of the test platform show that the design meets the requirements of the index.In this thesis,the simple and convenient method of calibration and testis realized by the optimization of some techniques,and the automation of the test is realized,which makes the test platform have high repeatability,stability and easy operation.The test platform can be applied to the engineering application of chip test,and can be applied to the electrical parameters test of MMIC under 40GHz.