| Owing to the booming development of micro electro mechanical systems(MEMS) technology, the progress of uncooled infrared detector has been substantial. The infrared detector is getting more than professional-use equipment used in military and astronomy with the technological progress and the cost reduction. In some new application fields such as automobile visual enhancement systems, smart air-conditioner, smartphones or other consumer products, there is an increasing demand for smaller and cheaper infrared detectors, typically the linear infrared detectors, which have been regarded as a promising consumer product.Starting from a project requirement, an 8-unit linear detector was finally fabricated through enough theoretical simulations and process researches. The test results beautifully satisfied the required. The thesis mainly includes:(1) The estimation of absorption properties of multi-layer membrane. In this thesis, two models for calculating the absorption rate through MATLAB were described. Then, the influences of structure parameters were discussed respectively to find the best ones.(2) The studies for the fabrication process. Series of technological process were provided here for device fabrication, including the layout of the mask, lithography, deposition, etching etc. The SEM image of the multi-layer membrane structure constructed on two micro-bridges was given.(3) Optical and electrical performance tests. The obtained reflection spectra of the detector showed good agreement with the former analysis of simulation. Besides, the voltage response, noise, specific detectivity were obtained. |
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