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Study On Integrated Optical Refractive Index Sensors Based On Polymer Waveguides

Posted on:2017-03-09Degree:MasterType:Thesis
Country:ChinaCandidate:X K ShenFull Text:PDF
GTID:2348330491963337Subject:Optical Engineering
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With the rapid development of integrated photonics, the optical waveguide refractive index sensor has attracted widespread attentions. Since the polymer material has a lot of advantages such as the low cost, high flexibility, low loss and so on, the study of polymer waveguide refractive index sensor plays an important role in the development of the integrated optical waveguide refractive sensors.A polymer based Mach-Zehnder ineterference (MZI) waguide refractive sensor and a polymer based waveguide Bragg grating sensor have been studied in this thesis, which includes four parts:the working principle of the device, the structural design, the fabrication processes and the characterizations.In the study of the MZI waveguide refractive sensor based on polymer materials, following aspects have been studied:(1) The working principle of the device based on the optical waveguide theroy; (2) Polymer ZPU44 and ZPU46 are used as the core and top cladding materials, the structure parameters such as the waveguide cross section shape, bending radius and the length of the sensing window were designed and optimized; (3) The designed polymer MZI sensor was fabricated using the traditional mirco-fabrication technology such as the contact photolithography and reactive ion etching (RIE); (4) An optical test system was built to test the performance of the device. The measuring results show that the polymer MZI sensor has a linear response when the refractive index changes from 1.33-1.44, and a sensitivity of 88dBm/RIU were obtained, which matches the theoretical results well.In the study of the waveguide Bragg grating refractive index sensor, the main work are as follows:(1)The principle of the device was demonstrated; (2)The polymer polysulfone and ZPU44 were used as the waveguide core and top cladding materials.Then the structural parameters of the waveguide such as the size of cross-section were designed; (3)The designed sensor was fabricated with the traditional mirco-fabrication technology such as the contact photolithography and reactive ion etching (RIE). Then some analysis and discussions have been given about the fabricated device.
Keywords/Search Tags:polymer waveguide, Mach-Zehnder ineterference, waveguide Bragg gratting, refractive index sensor
PDF Full Text Request
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