Research Of Piezoelectric Ceramics Driving Characteristics Based On Image Processing

Piezoelectric actuator is an important part of the micro and nano operation system with the micro and nano scale, but its own hysteresis nonlinear characteristic directly affects the nano operation precision of measurement and positioning, and the research of nonlinear characteristics has become the core issue of micro and nano positioning technology. Therefore, this research focuses on nonlinear characteristics, model description and nonlinear compensation of piezoelectric ceramic micro-actuator for accurate elimination and correction.Firstly, for the measurement of Piezoelectric ceramic micro-actuator, traditional method of measurement is using capacitance micrometer with costly and complicated operation. In this paper, precise measurements of the Piezoelectric ceramic micro-actuator is done by using modern computer vision technique of non-contact measurement methods. The measuring characteristic curve of the PZT is obtained by using this method and coincides with the actual measurement results, to satisfy the high precision micro nano measurement requirements. Secondly, the fractional-order mathematical model of Piezoelectric ceramic actuators is built by applying the theory of fractional differential equations, and non-linear optimization methods such as NLJ and PSO are used to identify fractional-order piezoelectric coefficients and order of mathematical model. A compensation correction controller, fractional Fractional PID controller and inverse controller are designed. Finally, the accuration of PZT fractional model of Piezoelectric ceramic actuator is verified. Experimental results show that the fractional model can accurately express the nonlinearity of Piezoelectric ceramic actuators. Model outputs are consistent with the actual measurement results. Meanwhile, fractional order controllers and point-by-point compensation controller designed were able to eliminate the hysteresis nonlinearity of Piezoelectric ceramic.This research work has the important theory significance and practical application value for the further research and development of piezoelectric actuator in the field of precision machining, micro nano positioning technology and micro electromechanical systems.