Study On Terahertz And Long-wavelength Infrared Detection Method Based On Metamaterial

In recent years, the exploration about the effective methods and technical means through combining the radio-frequency and optical imaging detection approach has become an international and domestic research hotspot, and thus received widespread concern and attention. Basic researches show that developing terahertz imaging detection technology based on metamaterials can provide a possible means to realize an integration approach of capturing radio-frequency and optical image information. Metamaterial is an artificial composite materials with unique electromagnetic transmission, dielectric and material interaction properties. The patterned micro-nano-dielectric structure designed particularly for special requirements, can present special physical characteristics through demonstrating needed values or even negative values of the dielectric constant and magnetic permeability. In general, the terahertz waves in the frequency range of about 0.1~10 THz is in a special electromagnetic wavelength region, and therefore present a dual-property involving optics and radio information. Terahertz imaging detection technology has characteristics including higher imaging resolution and contrast and uniformity compared to radio frequency imaging methods, and larger penetration depth and long-range observation compared to optical imaging approaches. So far, it's extremely lacking of the material and functional architecture to effectively detect terahertz and long-wavelength infrared radiation. However, the emergence of metamaterial maybe provides an opportunity to solve the problem above. This dissertation mainly aims at the study on terahertz and long-wavelength infrared detection method based on metamaterial to carry out the research work. The main content and innovations are as follows:A wide variety of terahertz and long-wavelength infrared metamaterial detection framework have been built respectively based on the nano-metal mask and high pure gallium arsenide composites. Better detection efficiency would be received by resonance responses between the architecture developed and incident electromagnetic waves. The resonant frequency of the radiation detection architecture can be changed effectively by modulating the appearance and feature size of metamaterial structure constructed.The simulations of the electric field, magnetic field and surface current distribution characteristic to the model have been made using finite element method and adaptive mesh refinement technique. Transmission property has been simulated using the transfer matrix algorithm. Then the structure characteristics and core parameters of the metamaterial detection architecture have been determined through the optimization of structure and parameters;Structures of the typical device and its variants have been designed according to the features and the production process requirement of metamaterial array detection framework. Lithography mask has been produced. Production, test and capsulation of the devices have been completed based on standard microelectronics technology;The signal test circuit has been designed and test platform of the device has been set up. At the same time, the photoelectric response test has been carried on. Then further course of the study has been proposed after comparing the test results with the results of simulation;Terahertz phased array has been designed by integrating the structural characters of terahertz imaging detectors and phased array. A strong detection output is achieved through comparing and analyzing the phase controlling performances of different phase unit. The developed detection method already presents higher wavebeam scanning speed compared to common approaches.