Multiple Degrees Of Freedom Based On QPD Optical Probe R&d And Application

With the development of scientific research,scientific experiments and industrial production of multi degree of freedom measurement technology is put forward the requirement of high precision and applicability.Multi degrees of freedom measurement technology is not the general mechanical measurement instrument can solve,the extensive research of multi degree of freedom measurement system,such as laser interferometer due to high cost,volume and complex assembly reasons restrict its wide application,So designed a low cost,simple structure,small volume,high precision of multi degree of freedom error measuring sensor is very necessary.This article is supported by National Natural Science Foundation Project : ‘Coupled Modeling And Influence Research In Functional Surface Structure And Performance(No.51490660/51490661)',Research based on QPD component and semiconductor laser optical non-contact measurement device can realize error of four degrees of freedom(X,Y direction straightness error,the deflection Angle and pitching Angle)of measurement at the same time.This article first elaborated the domestic and foreign development in the research field of multi degree of freedom measurement sensor,for multiple degrees of freedom measurement technology based on various measuring methods are compared.Then proposed based on optoelectronic autocollimation principle error of four degrees of freedom(X,Y direction straightness error,the deflection Angle and pitching Angle)of the measurement system at the same time,the system on the basis of the principle of autocollimation isolated a bunch of two-dimensional displacement measured datum beam.Analysis the angle measurement impact of the displacement measurement,and put forward the solution,implementation error separation.According to the plan to build the corresponding optical path,the design of the mechanical structure,completed the hardware circuit and the PC software.Through the calibration test of the measuring instrument,the displacement in the X direction and Y direction within the scope of ±200um measurement accuracy in 1um or so,the deflection Angle measurement precision can reach 2"and pitching Angle measurement precision can reach 3"(within 800" range).In addition to the establishment of a deflection Angle influence on displacement error model,implementation of displacement and Angle measurement error separation.Finally the calibration sensor is used to measure the thermal error of machine tool spindle system experiments.