Flexible And Transparent Dual Functional MEMS Sensors For Proximity And Pressure Detecting

Based on MEMS(Nano/Micro-company-Mechanical System,N/MEMS)close/pressure double function of flexible transparent MEMS sensors,flexible good flexible,high transparency,the overall quality of light,simple convenient wait for a characteristic,can be widely used in medical,military,industrial,and all aspects of life,has great research value.This topic has designed a kind of flexible transparent close/pressure double function of MEMS sensors,by studying its working principle and combined with the finite element simulation method,through a series of process to complete the production of this kind of sensor,finally the transparency,close/pressure on the sensor sensitivity and linearity of the study of the test.Firstly,the mechanism of sensing mechanism and performance of two modes are studied by analyzing the theory of close range and pressure sensing mode.The effect of the Angle,position and quantity of the PZT nanowires on the capacitance of the PZT nanowires was analyzed.Then,the PZT single crystal nanowires were prepared by using the two-step hydrothermal synthesis method.Characterization of the test results show that the PZT nanowires for growth of perovskite along[001]direction single crystal structure,length of about 50-100?m,diameter within 1?m,[110]direction of lattice fringe spacing is about 0.28 nm.Then,use the coated indium tin oxide(ITO)transparent conductive film of Polyethylene terephthalate(Polyethylene terephthalate,PET)film as the substrate,through photolithography and etching MEMS processing technology.By spin coating will be mixed with PZT single-crystal nanowires and polydimethylsiloxane(PDMS)colloid were coated on the two pieces of ITO/PET film for capacitor dielectric layer,and then two pieces of substrate vertically with each other and heat curing finishing device.At the same time,the flexible dual-function MEMS sensor with pure PDMS with no PZT nanowires was produced using the same method.Test results show that the mixture of PZT nanowires(PZT and PDMS quality ratio is about 0.6%)compared with the MEMS sensor did not contain PZT nanowires,the visible to near infrared optical through the HFM can good,are around 80%no difference.Finally,the results of the stress tests showed that the rate of capacitance of the MEMS sensor containing the PZT nanowires and the MEMS sensor with no PZT nanowires increased as the pressure increased.When applying the pressure between 0~120 Pa,two types of sensors are in approximate linear increase,indicating that is added in the PDMS PZT nanowires can significantly improve the pressure sensitivity of the transducer.The results of the proximity sensor test show that the capacitance rate of the two MEMS sensors increases with the proximity of the object.When close to the distance is within the scope of 1 to 10 cm,two types of sensors are in approximate linear increase,indicating that is added in the PDMS PZT nanowires can be improve the close sensor sensitivity sensor.