Design,Preparation And Actuation Performance Of PyroMEMS Safe And Arm Device

PyroMEMS?Pyrotechnical Micro Electrical Mechanical System?is a kind of micro pyrotechnic devices based on MEMS technology,which loads solid energetic materials as a functional fuel.PyroMEMS safe and arm?S&A?device can realize arming and disarming functions by the combustion of materials.A PyroMEMS S&A device based on solid state slider and micro actuator is designed and fabricated in this paper.Its main characteristics include that it does not need to use inertia force to disarm the device,large displacement,and integrated batch production.The main research contents and results are shown as follows:?1?A solid double cantilever beam S&A slider with PMMA?organic glass?as substrate was fabricated by precision engraving.A solid double cantilever beam S&A slider with Si as substrate was fabricated by plasma dry etching.?2?PyroMEMS micro-actuator was designed and fabricated.It mainly consists of three parts:igniter,micro charge and gas-forming agents.Si/Pb₃O₄ was selected as ignition charge whose mass ratio was 10%:90%.Binder was Nitrocellulose?NC?,and solvent was butyl acetate.The micro powder was charged by using inkjet deposition method,and the energetic ink combustion performance was characterized.The ignition performance of Ni/Cr bridge wire,SCB?semiconductor bridge?and MSCB?micro semiconductor bridge?was researched.?3?The explosion temperature,explosion heat and gas production rate of NaN₃/Fe₂O₃ and C₆H₂?N_O2?₃OK/KClO₄ were compared by theoretical calculation and experiment.Results show that the gas production rate of the two gas-forming agents is almost the same.but the explosion temperature and explosion heat of C₆H₂?N_O2?₃OK/KClO₄are larger than that ofNaN₃/Fe₂O₃.So,C₆H₂?N_O2?₃OK/KClO₄ has a better actuation ability.?4?ABAQUS simulation software was used to simulate the performance of the S&A slider and overload capacity along the slide direction.Results show that the comprehensive performance of PyroMEMS S&Adevice based on silicon substrate is better than that of PMMA.The cantilever of PyroMEMS S&A can sustain a bigger pressurealong with the decrease of the aspect ratio of the solid double cantilever beam.Also,the anti overload capacity of PyroMEMS S&Aslider increasedwith the decrease of the aspect ratio of the solid double cantilever beam.Experimental and simulation results show when the cantilever's length and width were 300?m × 300?m,PyroMEMS S&A device can work successful and it's cantilever can sustain an acceleration about 463.62m/s².In conclusion,this paper mastered the design and fabrication method of PyroMEMS S&Adevice,and obtained the influence rules of design parameters on the actuation performance.This paper provides theoretical and technical references for developing MEMS S&A device with independent intellectual property rights.