Study On The Quality Evaluation Of Substrate Surface For Electrodeposition Films

The thin film materials with unique optical,mechanical and electromagnetic properties,is widely used in the engineering field.As a common method of preparing thin films,the electric deposition method requires high quality surface as the substrate,and the surface quality of the substrate has an important influence on the quality of the film.Effective evaluation of the quality of the substrate surface could help us understand the importance of various factors on the substrate,and could provide a basis for the processing of the substrate.Therefore,it is great significance for the processing for the substrate to comprehensive evaluation of the quality of the surface of the substrate.Requirements for preparation of thin film on substrate surface by electric deposition.In order to evaluate the surface quality of the substrate scientifically,we take the copper substrate as the research object and proposed a comprehensive evaluation of the quality of the substrate surface,and established a complete characterization system for the surface quality of the thin film substrate.The main research works as follows:(1)The evaluation index system of comprehensive evaluation is determined.Including surface roughness,surface precision,damage depth and curvature of the four evaluation indexes.Based on the former research results and the evaluation criteria,the evaluation criteria of this paper are determined.(2)In order to determine the weight of each evaluation index more accurately,and avoid the influence of subjective factors on weight determination at the same time.This paper determine the index weight by entropy method,and combined with entropy method and fuzzy comprehensive evaluation method with comprehensive evaluation,then the level of quality of the substrate surface is obtained.(3)Using electrolytic copper as the processing object with different polishing methods,two different samples are prepared on the Nano-MAX polishing machine and the hydrodynamic suspension polishing platform.Then we get the value of four evaluation indexes of the two samples,then the sample is evaluated comprehensively,and the grade of the surface quality of the sample is obtained.(4)With the method of electric deposition,metal nickel films are deposited on two different substrates,and the films were characterized.It is concluded that the thin film is compact and smooth on the surface with good surface quality,but porous and loose on the surface with poor surface quality,and there are many defects in the structure of the thin films.Therefore the feasibility of the comprehensive evaluation system of the quality of the substrate surface is verified.In conclusion,the evaluation index system and the evaluation criteria of the quality of the substrate surface are established.By combining with entropy method and fuzzy comprehensive evaluation method,the quality of the surface of the substrate is evaluated,then the weight of each evaluation index is obtained,and the level of quality of the surface of the substrate can be obtained more scientifically and accurately.The work is of great significance to guide the substrate processing.