| Aerostatic bearing is widely used in precision manufacturing equipment working platform, IC manufacturing, high precision machine, optical measurement equipment etc.Bearing capacity, dynamic stiffness and stability is the impact of equipment dynamics,then main factors influencing precision, bearing capacity, dynamic stiffness is low key limit in precision machining workbench application.It is of great practical value to improve the bearing capacity and dynamic stiffness, and to improve the anti disturbance ability of air bearing. It is also a difficult and hot spot in the industry.This paper adopts the display type piezoelectric actuator structure dynamic change of aerostatic bearing, dynamic change of gas film shape and air gap field distribution, which can significantly improve the bearing capacity and dynamic stiffness.The main work and innovation of this paper are as follows:First of all, the overall scheme of Active Aerostatic Bearing Analysis, determine the main parameters of aerostatic bearing, including external size, plate thickness,piezoelectric element layout and model selection, to complete the design of the basic structure of aerostatic bearing.Secondly, on the basis of the design of the air bearing structure, according to the experimental characteristics of the piezoelectric ceramics, the relationship between the output and the maximum displacement of the piezoelectric element is derived.by using Pro/ E modeling software to complete the simplified modeling and structure of aerostatic bearing, and then imported to the ANSYS finite element software to complete the simulation analysis of the deformation of the bottom plate under a series of constant voltage, and the modal analysis of the whole air bearing support.Finally, set up the aerostatic bearing test platform,using the experiment equipment to carry out the modal experiment and the experiment of the bottom plate deformation under different driving voltage and different frequency sine voltage.The experiment proves the correctness of the finite element analysis, lay the foundation for the realization of thereal-time control of aerostatic bearing. |
