Analysis And Research On Safety Engineering Of Polysilicon Production Device Based On RBSA

At present,our country in the production of polysilicon,most still use the improved SIEMENS method,reducing three chlorosilane by hydrogen technology for deposition of silicon in the silicon core heating body,to achieve large-scale production of polysilicon.This process also includes the reduction of dry gas recovery system,four hydrogen chloride and other processes.Although this process has been widely used in China,but in the polysilicon production process of risk assessment and accident prevention,and other aspects,the experience is still inadequate.It is well known that hydrogen,trichlorosilane,dichloride silane materials such as chemical property is very lively,and the corrosion resistance of the silane is very strong,and in the whole process of polysilicon production,the inner environment is high temperature and high pressure.These factors led to the polysilicon production process is a relatively high-risk process,if there is a lot to prevent improper,possible production accident,a serious threat to the development of polysilicon enterprise and employee safety.In order to enable more polysilicon enterprises to understand the risks and hazards,the production process at the same time,to provide some basis for accident prevention,better prevention of accidents,improve the ability of enterprise production safety and accident prevention.In this paper,the production process means a large polysilicon production enterprise as an example,according to the RBSA(Risk Based Security Assessment)analysis methods,combined with years of production safety work experience,some using the method of risk identification of major hazard sources and statistical analysis,the existence of dangerous factors in the polysilicon production device and safety risk the accident analysis,combined with the production process and material characteristics and in recent years,from the time,space,accident reason and other aspects of comprehensive analysis,finally,from the time and regional perspectives will need attention in polysilicon production security key are analyzed and summarized,and discussed relevant preventive measures,provide support for the safety production of polysilicon.