Design And Experimental Investigation Of Ultra-precision Milling-grinding Machining System

In the field of aerospace,medical and micro-electronics industry,miniature parts are playing more and more important roles.The new developed micro machining technology based on traditional machining has outstanding flexiblity and is capable of milling,turning and polishing operation.Compared with other machining method based on etching,micro machining can achieve higher material removal rate with lower cost.So this technology has better development opportunity in the future.The machining of the small key part with feature size is the key in the field of manufacturing.Orienting to the thin elastic sensitive component with micro structure of one key model aviation program,which is a kind of micro thin-walled component,this project designs an ultra-precision milling-grinding machining system.According to the technical requirements of processing,this paper solves several technical problems,including how to finish the high precision motion system,how to achieve high precison position control and how to monitor the change of micro force and keep the force controlled.According to the processing requirements of the micro component,the overall design of ultra-precision milling-grinding machining system were completed.Based on the principle of aerostatic technologies,the formulas of rectangular aerostatic guideway with orifice distribution in single row and double row were deduced for static performance,and a modified method was mentioned for calculating single orifice distribution static performance.The cross hydrostatic guideway and its kinetic control system were designed.What's more,assembly and accuracy detection of this system were completed.For the precision feed demand in vertical direction,the high precision motion system and its precision detections was designed and completed.The high-speed air bearing electric spindle was built the communication and controlled by using VS and LABVIEW for micro milling and a two-dimensional force sensor for grinding was designed and debugged to have a better tool setting way for grinding.Some experimental investigations were made with this ultra-precision machining system.For the micro milling processing experiments,this paper studied the effect of feed per tooth and cutting depth on the surface quality of micro component bottom to improve the machining quality with further optimization of micro milling parameters.For the grinding processing experiments,here studied the influence of different size of grinding pastes and varies track of grinding with the removel of metamorphic.Qualified micro components are successfully machined finally aiming at providing technical supports for mass processing of micro components in the future.