Fabrication Of Micro-nano Pohotonic Structure Based On CHP-C Photosensitive Material By Holography Interference

In the developing process of information photonic subject,micro-nano photonic crystals are a new type of artificial preparation photonic structure.It has attracted wide attention in physics,materials and other fields because it can regulate the characteristics of photon propagation.And it has always been considered to guide the future of the photon industry revolution.With the development of photonic crystal applications in recent years,the research on the structure,morphology and performance of photonic crystals has been extended.As a kind of efficient method for fabricating micro-nanostructures,holographic lithography technique is widely used because of its simple preparation,low cost,large area samples.This paper is based on laser interference theory.We use the photonic crystal cycle structure as a breakthrough point,propose an asymmetric optical path to fabricate photonic crystal structures,and carry out computer simulation and experimental preparation work.In this paper,the optical path configuration conditions of different asymmetric beams and the beam parameters that affect the morphology of photonic crystals are simulated and analyzed.This provides theoretical guidance for holographic lithography experiment preparation and promotes application research.Simultaneously,based on the study of the properties of the photoresist,we carried out the experimental preparation of the asymmetric optical path and obtained different two-dimensional structures with different beam polarizations.The preparation of two-dimensional photonic crystal structure by asymmetric beam provides the ideas and methods for the development and further application of laser holographic lithography.The main contents of this paper are as follows:Firstly,we introduce the basic concepts and characteristics of photonic crystals at home and abroad,the current preparation methods of photonic crystals,and expound the significance of this paper.Then,we introduce the principle of multi-beam interference and the basic principle of laser holography.And the computer software is used to adjust the parameters and simulate the ideal structure.After that,we construct the experimental optical path and prepare the simple grating,according to the theory of laser interference and based on the law of optical path propagation.We study the photographic properties of CHP-C as the research object and focused on the exposure,the choice of developer and developing time.Afterwards,we break the traditional symmetrical optical path design,used asymmetric five beams to fabricate two-dimensional photonic crystals,changed the polarization of the beam obtained and get a different structure.Finally the work of this paper and the conclusion is summarized.The next step based on the present work and prospects has been present.