Research On Three-dimensional Complex Structure Based On Multi-material Micro-nano Fabrication Technology

Based on the multi-material micro-nano fabrication technology, the preparation technology of three-dimensional complex structure is studied. The fabrication of microneedle arrays based on moving X-ray lithography, and the fabrication of multi-material diaphragm micropump for microfluidic systems using a variety of micro-nano fabrication technology were studied.The microneedle arrays with different structures were fabricated by moving X-ray lithography. A solid microneedle array was prepared on a polymethylmethacrylate (PMMA)substrate by using two 90°crossed moving X-ray lithography processes; Using alignment X-ray exposure process on solid microneedle array, and a hollow microneedle array was fabricated. Using polydimethylsiloxane (PDMS) transfer process, multi-material batched transfer of complex three-dimensional structure microneedles were realized. This further reduces the cost of the microneedle fabrication. In this paper, aiming at the importance of developing conditions for PMMA process by moving X-ray lithography, the influence factors such as exposure dose, development temperature and development time are discussed. The effects of the developing conditions on the machining depth and surface roughness were studied. These results are important reference for microstructure processing based on moving X-ray lithography.Finally, a diaphragm piezoelectric micropump of piezoelectric ceramic transducer-silicon(PZT-Si) multi-material was designed and fabricated by using micro-nano fabrication technology such as lithography process, etching process, bonding process, thinning process and excimer laser processing technology. The micropump structure is simple, and can achieve the control of micron-level liquid drive.The fabrication technology involved in micropump fabrication process also has a important reference value the for the development of other related devices.